Abstract
This study designs, fabricates, and characterizes a novel micro electromagnetic actuator comprising a PDMS diaphragm, a polyimide-coated copper micro coil, and a permanent magnet. When an electrical current is passed through the micro coil, a magnetic force is induced between the coil and the magnet which causes the diaphragm to deflect, thereby creating an actuation effect. The experimental results demonstrate that the diaphragm deflection can be accurately controlled by regulating the current passed through the micro coil. It is shown that the maximum diaphragm deflection within elastic limits is 150 μm; obtained by passing a current of 0.6 A through a micro coil with a line width of 100 μm. The micro actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.
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The authors would like to thank the financial support provided by the National Science Council in Taiwan (NSC 97-2221-E-020-038, NSC 97-2218-E-006-012, and NSC 96-2218-E-006-004).
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Lee, CY., Chen, ZH., Chang, HT. et al. Design and fabrication of novel micro electromagnetic actuator. Microsyst Technol 15, 1171–1177 (2009). https://doi.org/10.1007/s00542-008-0734-9
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DOI: https://doi.org/10.1007/s00542-008-0734-9