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Simulation of a novel lateral axis micromachined gyroscope in the presence of fabrication imperfections

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Abstract

This paper proposes a method to simulate a lateral axis micromachined gyroscope in the presence of two kinds of fabrication imperfections using finite element simulation. Non-ideal performances caused by lateral over-etching are simulated by modal analysis. Beam width variations are simulated by harmonic analysis. Simulation and discussion of the asymmetric motion caused by beam width variations show the advantage of our design with doubly decoupled structure and special arrangement of sensing capacitors.

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Acknowledgments

This paper is partially supported by the Natural Science Foundation of China under Grant No. 50575001. The authors would like to thank the technical staffs of the National Key Laboratory of Micro/Nano Fabrication Technology at Peking University for the support on device fabrication.

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Authors and Affiliations

  1. California Institute of Technology, Pasadena, CA, 91125, USA

    Bo Lv, Xuesong Liu, Zhenchuan Yang & Guizhen Yan

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  1. Bo Lv
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  2. Xuesong Liu
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  3. Zhenchuan Yang
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  4. Guizhen Yan
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Correspondence to Bo Lv.

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Lv, B., Liu, X., Yang, Z. et al. Simulation of a novel lateral axis micromachined gyroscope in the presence of fabrication imperfections. Microsyst Technol 14, 711–718 (2008). https://doi.org/10.1007/s00542-007-0495-x

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  • DOI: https://doi.org/10.1007/s00542-007-0495-x

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