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Nanotribological characterization of perfluoroalkylphosphonate self-assembled monolayers deposited on aluminum-coated silicon substrates

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Abstract

Aluminum-coated silicon substrates are commonly used for various micro/nanooptoelectromechanical systems (MOEMS/NOEMS) including Digital Micromirror Devices (DMD®). For efficient and failure proof operation of these devices, ultra-thin lubricant films of self-assembled monolayers (SAMs) are increasingly being employed. Fluorinated molecules are known to exhibit low surface energy, adhesion, and friction, desirable for tribological applications. In this study, we investigate contact angle, surface energy, friction, adhesion, and wear properties of a perfluoroalkylphosphonate SAM and compare them with those of alkylphosphonate SAMs. The influence of relative humidity, temperature, and sliding velocity on the friction and adhesion behavior is studied. Failure mechanisms of SAMs are investigated by wear tests. These studies are expected to aid in the design and selection of proper lubricants for MOEMS/NOEMS.

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Acknowledgment

Financial support for this work was provided by the US National Science Foundation (Contract No. ECS-0301056) and the Swiss Technology Oriented Program of TOP Nano 21 (Contract CTI 5824.4), Bern. The content of this information does not necessarily reflect the position or policy of the US Government and no official endorsement should be inferred.

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Authors and Affiliations

  1. Nanotribology Laboratory for Information Storage and MEMS/NEMS, The Ohio State University, 650 Ackerman Road, Suite 255, Columbus, OH, 43202, USA

    Bharat Bhushan & Michal Cichomski

  2. LMCH, IMX, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland

    Enamul Hoque & Hans J. Mathieu

  3. LTCM, ISE, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland

    James A. DeRose

  4. LOA, IOA, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland

    Patrik Hoffmann

Authors
  1. Bharat Bhushan
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  2. Michal Cichomski
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  3. Enamul Hoque
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  4. James A. DeRose
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  5. Patrik Hoffmann
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  6. Hans J. Mathieu
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Correspondence to Bharat Bhushan.

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Bhushan, B., Cichomski, M., Hoque, E. et al. Nanotribological characterization of perfluoroalkylphosphonate self-assembled monolayers deposited on aluminum-coated silicon substrates. Microsyst Technol 12, 588–596 (2006). https://doi.org/10.1007/s00542-006-0111-5

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  • DOI: https://doi.org/10.1007/s00542-006-0111-5

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