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Surface plasma treatments enabling low temperature direct bonding

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Abstract

Plasma activations for wafer bonding have been investigated for their ability to induce strong bonding even at low temperature treatment. Generally occurring with plasma treatment, revelation of many bonding defects (e.g. bubbles, voids,...) during (200–500°C) low temperature annealing is an important issue. In this paper, we will focus on bonding energy and quality enhancement obtained after reactive ion etch or microwave plasma treatment, under various atmospheres. Effects of a short plasma treatment on Si and SiO2 surfaces are highlighted hereafter. Low-density layers around bonding interfaces have been characterized by interfacial X-ray reflectivity. Evolution of these layers through subsequent annealing are discussed to help in understanding mechanisms involved through such plasma treatments.

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References

  • Esser RH, Hobart KD, Kub FJ (2003) J Electrochem Soc 150(3):G228-G231

    Article  Google Scholar 

  • Maleville C, Rayssac O, Moriceau H, Biasse B, Baroux L, Aspar B, Bruel M (1997) Semiconductor Wafer Bonding. Science, Technology and Applications IV, ECS PV 97-36, pp 46–55

  • Maszara WP, Goetz G, Caviglia A, Mc Kiterrick JB (1988) J Appl Phys 64:4943

    Article  Google Scholar 

  • Moriceau H, Fournel F, Rayssac O, Soubie A, Bataillou B, Aspar B (2001) Semiconductor Wafer Bonding. Science, Technology and Applications, VI ECS PV 01-27, pp 1–16

  • Moriceau H, Bataillou B, Morales C, Cartier AM, Rieutord F (2003) Semiconductor Wafer Bonding. Science, Technology and Applications VII, ECS PV 3-19, pp 110–117

  • Pasquariello D, Camacho M, Hjort K (2000) IEEE Lasers Electro-Opt Soc 2:852–853

    Google Scholar 

  • Rieutord F, Eymery J, Fournel F, Buttard D, Oeser R, Plantevin O, Moriceau H, Aspar B (2001) Condensed matter and materials physics. Phys Rev B 63(12):125408/1–5

    Google Scholar 

  • Sanz Velasco A, Amirfeiz P, Bentsson S, Colinge C (2003) J Electrochem Soc 150(2):G155–G162

    Article  Google Scholar 

  • Sun GL, Zhan J, Tong QY, Xie SJ, Cai YM, Lu SJ (1988) J Physique 49(C4):79

    Google Scholar 

  • Tong QY, Gösele U (1999) Semiconductor wafer bonding science and technology. Wiley, New York

    Google Scholar 

Download references

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Authors and Affiliations

  1. CEA-DRT/LETI-DIHS - CEA/GRE, 17 Rue des Martyrs, 38054, Grenoble, Cedex 9, France

    Hubert Moriceau, Christophe Morales & Anne Marie Charvet

  2. CEA-DRFMC- CEA/GRE, 17 Rue des Martyrs, 38054, Grenoble, Cedex 9, France

    François Rieutord

Authors
  1. Hubert Moriceau
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  2. François Rieutord
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  3. Christophe Morales
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  4. Anne Marie Charvet
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Correspondence to Hubert Moriceau.

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Moriceau, H., Rieutord, F., Morales, C. et al. Surface plasma treatments enabling low temperature direct bonding. Microsyst Technol 12, 378–382 (2006). https://doi.org/10.1007/s00542-005-0058-y

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  • DOI: https://doi.org/10.1007/s00542-005-0058-y

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