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Received: 25 July 1998/Accepted: 1 October 1998
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Leinhos, T., Stopka, M. & Oesterschulze, E. Micromachined fabrication of Si cantilevers with Schottky diodes integrated in the tip . Appl Phys A 66 (Suppl 1), S65–S69 (1998). https://doi.org/10.1007/s003390051101
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DOI: https://doi.org/10.1007/s003390051101