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Passivation properties of alumina for multicrystalline silicon nanostructure prepared by spin-coating method

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Abstract

In this paper, we report passivation properties of inverted pyramidal nanostructure based multi-crystalline silicon (mc-Si) by Al2O3 films with spin-coating method. Precursors AlCl3 and Al(acac)3 for Al2O3 films were chosen for comparison. Al2O3/SiOx stacks were found to be able to passivate the nanostructured surface well. With the number of spin-coating up to five, the Al2O3 films could conformally attach the nanostructure. The weighted average reflectance values (ranging from 400–900 nm) of the passivated silicon surface could be reduced to 10.74% (AlCl3) and 11.12% (Al(acac)3), and the effective carrier lifetime could reach 7.84 and 16.98 μs, respectively. This work presented a potential process to fabricate low cost high efficiency mc-Si solar cells.

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Acknowledgements

This work has been financially supported by the Fundamental Research Funds for the Central Universities (3082017NP2017106), National Nature Science Foundation of China (61176062), a Joint Frontier Research Project of Jiangsu Province (BY2016003-09), a Project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions.

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Authors and Affiliations

  1. College of Materials Science and Technology, Nanjing University of Aeronautics and Astronautics, Jiangsu Key Laboratory of Materials and Technology for Energy Conversion, 29 Yudao Street, Nanjing, 210016, People’s Republic of China

    Ye Jiang, Honglie Shen, Wangyang Yang, Chaofan Zheng, Quntao Tang, Hanyu Yao, Adil Raza & Yufang Li

  2. Key Laboratory of Silicon Based Electronic Materials of Jiangsu Province, Jiangsu GCL Silicon Material Technology Development Co., Ltd., No. 88 Yangshan Road, Xuzhou, 221000, People’s Republic of China

    Chunlai Huang

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  1. Ye Jiang
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  2. Honglie Shen
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  3. Wangyang Yang
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  4. Chaofan Zheng
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  5. Quntao Tang
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  6. Hanyu Yao
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  8. Yufang Li
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  9. Chunlai Huang
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Correspondence to Honglie Shen.

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Jiang, Y., Shen, H., Yang, W. et al. Passivation properties of alumina for multicrystalline silicon nanostructure prepared by spin-coating method. Appl. Phys. A 124, 95 (2018). https://doi.org/10.1007/s00339-017-1542-9

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