Abstract
Stress/strain around the line recorded inside borosilicate glass was investigated by polarization microscopy. Thermal accumulation effects were observed during in-bulk recording. The relevance of the phenomena for laser scribing and dicing applications is discussed.
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C.B. Schaffer, A.O. Jamison, E. Mazur: Appl. Phys. Lett. 84, 1441 (2004)
O. Efimov, S. Juodkazis, H. Misawa: Phys. Rev. A 69, 042903 (2004)
S. Juodkazis, K. Yamasaki, S. Matsuo, H. Misawa: Appl. Phys. Lett. 84(4), 514 (2004)
E. Vanagas, J. Kawai, D. Tuzilin, I. Kudryashov, A. Mizuyama, K.G. Nakamura, K.-I. Kondo, S.-Y. Koshihara, M. Takesada, K. Matsuda, S. Juodkazis, V. Jarutis, S. Matsuo, H. Misawa: J. Microlith. Microfab. Microsyst. 3(2), 358 (2004)
E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, H. Misawa: Appl. Phys. Lett. 82(17), 2901 (2003)
K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao: Appl. Phys. Lett. 71(23), 3329 (1997)
C.B. Schaffer, A. Brodeur, J.F. Garca, E. Mazur: Opt. Lett. 26, 93 (2001)
K. Miura, J. Qui, S. Fujiwara, S. Sakaguchi, K. Hirao: Appl. Phys. Lett. 80(13), 2263 (2002)
M. Watanabe, H.-B. Sun, S. Juodkazis, T. Takahashi, S. Matsuo, Y. Suzuki, J. Nishii, H. Misawa: Jpn. J. Appl. Phys. 27(12B), L1527 (1998)
S. Juodkazis, A.V. Rode, E.G. Gamaly, S. Matsuo, H. Misawa: Appl. Phys. B 77, 361 (2003)
M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, K. Midorikawa: Appl. Phys. A 76(5), 857 (2003)
Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, Y. Jiang: Opt. Lett. 26(23), 1912 (2001)
S. Juodkazis, K. Yamasaki, V. Mizeikis, S. Matsuo, H. Misawa: Appl. Phys. A 79, 1549 (2004) (DOI: 10.1007/s00339-004-2845-1)
K.-I. Kawamura, M. Hirano, T. Kurobori, D. Takamizu, T. Kamiya, H. Hosono: Appl. Phys. Lett. 84(3), 311 (2004)
Y. Cheng, K. Sugioka, K. Midorikawa: Opt. Lett. 29(17), 2007 (2004)
K. Yamada, W. Watanabe, Y. Li, K. Itoh, J. Nishii: Opt. Lett. 29(16), 1846 (2004)
H. Sun, Y. Xu, S. Juodkazis, K. Sun, M. Watanabe, S. Matsuo, H. Misawa, J. Nishii: Opt. Lett. 26(6), 325 (2001)
V. Mizeikis, K.K. Seet, S. Juodkazis, H. Misawa: Opt. Lett. 29(17), 2061 (2004)
T. Kondo, S. Matsuo, S. Juodkazis, H. Misawa: Appl. Phys. Lett. 79(6), 725 (2001)
S. Juodkazis, H. Misawa, I. Maksimov: Appl. Phys. Lett. 85(22), 5239 (2004)
M. Miwa, S. Juodkazis, T. Kawakami, S. Matsuo, H. Misawa: Appl. Phys. A 73(5), 561 (2001)
H. Aben: Photoelasticity of glass, Springer-Verlag Berlin (1993)
M. Bass (Ed.): Handbook of optics, Vol. II, McGraw, Inc., New York (1995)
W.C. Elmore, M.A. Heald: Physics of waves, DoverPubl., Inc., New York (1985)
M. Watanabe, S. Juodkazis, J. Nishii, S. Matsuo, H. Misawa: In Photon Processing in Microelectronics and Photonics (Jan. 19–25 2002, San Jose, USA) SPIE Proc. 4637, ed. by K. Sugioka, M.C. Gower, R.F. Haglund, A. Pique, F. Trager, J.J. Dubikowski, W. Hoving (2002) pp. 159–168
N.I. Koroteev, I.L. Shumai: Physics of intense laser radiation, Nauka, Moscow (1991)
A. Marcinkevicius, V. Mizeikis, S. Juodkazis, S. Matsuo, H. Misawa: Appl. Phys. A 76, 257 (2003)
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42.25.Lc; 42.62.Cf; 42.70.Ce
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Vanagas, E., Ye, JY., Li, M. et al. Analysis of stress induced by a three-dimensional recording in glass. Appl. Phys. A 81, 725–727 (2005). https://doi.org/10.1007/s00339-005-3228-y
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DOI: https://doi.org/10.1007/s00339-005-3228-y