Abstract
A new ablation target geometry is presented that was used to produce thin films of La1-xSrxMnO3 grown heteroepitaxially on SrTiO3 by pulsed reactive crossed-beam laser ablation. The films were grown in order to perform angle-resolved photoelectron spectroscopy, which demands that the surface be atomically flat. In situ and ex situ analysis shows that this condition was met, even after depositing to a thickness of over 100 nm.
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61.10.-i; 61.18.Bn; 68.47.Gh; 71.27.+a; 81.15.Fg
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Willmott, P., Herger, R., Falub, M. et al. Pulsed laser deposition of atomically flat La1-xSrxMnO3 thin films using a novel target geometry. Appl. Phys. A 79, 1199–1201 (2004). https://doi.org/10.1007/s00339-004-2717-8
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DOI: https://doi.org/10.1007/s00339-004-2717-8