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Input-shaping-based improvement in the machining precision of laser micromachining systems

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Abstract

Laser machining is widely used in micro/nanomachining owing to its noncontact nature, environmental friendliness, high level of automation, and short process time. Notably, for micro/nanomachining, the precisions of both the laser and optical systems and motion control systems are crucial. Typically, residual vibrations generated during the motion of machine parts reduce precision at the micro/nanoscales. The input-shaping method is simple and effective for reducing such residual vibrations. Hence, traditional input-shaping methods are primarily used in flexible systems, such as cranes, robots, and motion systems. This is because a flexible system has a low rigidity, damping ratio, and natural frequency; thus, its residual vibration is higher than that of a high-rigidity motion system. In this study, residual vibrations were reduced by applying the input-shaping method to a high-rigidity motion system for precision laser machining. A modified zero-vibration (ZV) shaper was used to apply input shaping to the high natural frequency of a high-rigidity motion system. The modified ZV shaper was evaluated, and its residual vibration suppression performance was confirmed based on its application to a flexible system. Furthermore, errors caused by accelerations in corner machining were quantified, and residual vibrations were suppressed via the application of the modified ZV shaper.

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Funding

This work was supported by INHA UNIVERSITY Research Grant. This paper was supported by Korea Institute for Advancement of Technology (KIAT) grant funded by the Korea Government (MOTIE) (P0020612, HRD Program for Industrial Innovation).

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Authors and Affiliations

  1. Department of Mechanical Engineering, Inha University, Incheon, Korea

    Dong-Wook Lim, Ji-Hun Kim & Hyun-Taek Lee

  2. Mechanical System Engineering Department, Kumoh National Institute of Technology, Gumi-si, Korea

    Seong-Wook Hong

  3. Department of Mechanical, Automotive Engineering, Dong Seoul University, Seongnam-si, Korea

    Seok-Jae Ha

  4. Department of Construction Machinery Engineering, Inha University, Incheon, Republic of Korea

    Hyun-Taek Lee

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  1. Dong-Wook Lim
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  2. Seong-Wook Hong
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Correspondence to Hyun-Taek Lee.

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Lim, DW., Hong, SW., Ha, SJ. et al. Input-shaping-based improvement in the machining precision of laser micromachining systems. Int J Adv Manuf Technol 125, 4415–4424 (2023). https://doi.org/10.1007/s00170-023-10869-5

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  • DOI: https://doi.org/10.1007/s00170-023-10869-5

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