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Direct comparison of ion scattering and secondary ion emission as tools for analysis of metal surfaces

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Abstract

In this work an experiment is described which allows in situ comparison of SIMS (Secondary Ion Mass Spectrometry) and ISS (Ion Scattering Spectrometry). Measurements on Cu and stainless stell surfaces show that in some respects qualitative agreement between both methods exists. In both cases quantitative surface composition analysis is hampered by the lack of knowledge of secondary ion yields. Especially in case of SIMS the adsorbed species like oxygen have a great influence on the ion yield.

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Authors and Affiliations

  1. Max-Planck-Institut für Plasmaphysik, EURATOM-Association, D-8046, Garching, Fed. Rep. Germany

    M. Grundner, W. Heiland & E. Taglauer

Authors
  1. M. Grundner
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  2. W. Heiland
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  3. E. Taglauer
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Grundner, M., Heiland, W. & Taglauer, E. Direct comparison of ion scattering and secondary ion emission as tools for analysis of metal surfaces. Appl. Phys. 4, 243–248 (1974). https://doi.org/10.1007/BF00884235

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  • DOI: https://doi.org/10.1007/BF00884235

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