Access this article
We’re sorry, something doesn't seem to be working properly.
Please try refreshing the page. If that doesn't work, please contact support so we can address the problem.
References
K. SCHWARZet al., Phys. Rev. B 32 (1985) 8312.
B. KARLSSON and C. G. RIBBING,SPIE, Optical Coatings for Energy Efficiency and Solar Applications324 (1982) 52.
P. C. JOHNSON and H. RANDHAWA,Surf. Coat. Technol. 33 (1987) 53.
VON R. JUZA, A. RABENAU and I. NITSCHKE,Z. Anorg. Allg. Chem. 332 (1964) 1.
L. N. SOLNYSHKOet al., Sov. J. Opt. Technol. 48 (1981) 562.
D. S. YEEet al., J. Vac. Sci. Technol. A4 (1986) 381.
B. O. JOHANSSONet al., J. Mater. Res. 1 (1986) 442.
A. SCHLEGELet al., J. Phys. C/Solid State Phys. 10 (1977) 4889.
B. KARLSSONet al., Solar Energy Mat. 7 (1983) 401.
L. PORTE,Solid State Comm. 50 (1984) 303.
K. TANABEet al., Jpn. J. Appl. Phys. 26 (1987) L570.
R. P. NETTERFIELDet al., Rev. Sci. Instrum. 56 (1985) 1995.
G. I. GRIGOROV and I. N. MARTEV,Thin Solid Films 143 (1986) 177.
R. P. NETTERFIELDet al., J. Appl. Phys. 63 (1988) 760.
K. S. ROBINSON and P. M. A. SHERWOOD,Surf. Interf. Anal. 6 (1984) 261.
S. HOFMANN and J. M. SANZ,J. Trace Microp. Tech. 1 (1982) 213.
M. KONUMA and O. MATSUMOTO,J. Less-Common Metals 56 (1977) 129.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Netterfield, R.P., Martin, P.J. & McKenzie, D.R. Properties of ZrN x prepared by ion-assisted deposition. J Mater Sci Lett 9, 972–974 (1990). https://doi.org/10.1007/BF00722192
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF00722192