Abstract
Previous studies suggest that silicon oxynitride can be synthesized by pyrolysing polymers which are produced by the copolymerization of cyclic polysiloxanes and cyclic polysilazanes. The cyclic polysiloxanes required are [CH3Si(H)O]m with m=4, 5 and 6, and these can be produced by the hydrolysis of dichloromethylsilane. In the present work, a significantly improved combined yield of these cyclic polysiloxanes is reported. Three main reasons are attributed to this achievement: an improved hydrolysis procedure; optimization of the initial acidity of the reaction medium; and changes in the total reaction time. Thus a mixture containing > 95 mol% cyclic tetramer, pentamer and hexamer has been prepared and this represents a ∼ 20 mol% improvement over previously reported results. Investigations of the preparation and characterization of the cyclic polysilazanes, copolymers and silicon oxynitride will be described in Parts II–IV, respectively.
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Yu, GE., Parrick, J., Edirisinghe, M. et al. Synthesis of silicon oxynitride from a polymeric precursor. JOURNAL OF MATERIALS SCIENCE 28, 4250–4254 (1993). https://doi.org/10.1007/BF00351262
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DOI: https://doi.org/10.1007/BF00351262