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Spatially confined laser-induced damage of Si under a liquid layer

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Abstract

Experimental results are presented on the Si damage induced by a copper-vapor laser beam under a layer of chemically neutral liquid (H2O, DMFA, DMSO). The lateral dimensions of the damaged area coincide with those of laser beam, while the depth of the damaged area increases with time. The rate of hole formation may be as high as 75 μm/s. The qualitative interpretation of the results is given on the basis of laser generation of vacancies, and their combination and redistribution in the field of the inhomogeneous mechanical strains due to multiple heating/cooling cycles of the surface of the semiconductor.

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References

  1. D. Bäuerle: Chemical Processing with Lasers, Springer Ser. Mater. Sci. Vol. 1 (Springer, Berlin, Heidelberg 1986)

    Google Scholar 

  2. R. Kullmer, D. Bäuerle: Appl. Phys. A 43, 227–232 (1987)

    Google Scholar 

  3. P. Mogyorosi, K. Piglmayer, R. Kullmer, D. Bäuerle: Appl. Phys. A 45, 293–299 (1988)

    Google Scholar 

  4. R.J. von Gutfeld, R.T. Hodgson: Appl. Phys. Lett. 40 (4), 352–354 (1988)

    Google Scholar 

  5. R.M. Osgood, Jr., A. Sanchez-Rubio, D.J. Ehrlich, V. Daneu: Appl. Phys. Lett. 40 (5), 391–393 (1982)

    Google Scholar 

  6. J. Kiss, P. Mogiorosi, E.A. Kozlova, A.I. Portnyagin, A.V. Philippov, G.A. Shafeev: Appl. Phys. A 37, 252–253 (1985)

    Google Scholar 

  7. M.R. Brook, K.I. Grandberg, G.A. Shafeev: Appl. Phys. A 52, 78 (1990)

    Google Scholar 

  8. Handbook of Optical Constants of Solids, ed. by E.D. Palik (Academic, New York 1985)

    Google Scholar 

  9. V.I. Boyko, F.V. Bunkin, N.A. Kirichenko, B.S. Lukyanchuk, V.N. Pet'kov, E.R. Tzaryov: Preprint IOFAN No. 12, Moscow 1985 (in Russian)

  10. J. Lukes, R. Sasik, J. Polecha, J. Kubatova: Proc. of the V-th Int. School on Quantum electronics, Sunny Beach, Bulgaria, Sept. 26-Oct. 1, 1988

  11. L.D. Landau, E.M. Lifshitz: Theory of Elasticity (Pergamon, New York 1986)

    Google Scholar 

  12. B. Zysset, R.P. Salathé, J.L. Martin, R. Gottardt, F.K. Reinhart: In Laser Processing and Diagnostics, ed. by D. Bäuerle, Proc. of an Int. Conf., University of Linz, Austria, July 15–19, 1984 (Springer, Berlin, Heidelberg 1984) p. 469

    Google Scholar 

  13. J.M. Ziman: Principles of the Theory of Solids (Cambridge University Press, Cambridge (1972)

    Google Scholar 

  14. N. Itoh: In Interface under Laser Irradiation, ed. by L.D. Laude, D. Bäuerle, M. Wautelet Nijholf, Dordrecht (1987) p. 215

    Google Scholar 

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Author notes

  1. G. A. Shafeev

    Present address: Laboratoire de Physique de l'Etat Solide, ave. Maistriau, 23, B-7000, Mons, Belgium

Authors and Affiliations

  1. General Physics Institute of USSR Academy of Sciences, Vavilov Str., 38, Moscow, USSR

    G. A. Shafeev & A. V. Simakhin

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  1. G. A. Shafeev
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  2. A. V. Simakhin
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Shafeev, G.A., Simakhin, A.V. Spatially confined laser-induced damage of Si under a liquid layer. Appl. Phys. A 54, 311–316 (1992). https://doi.org/10.1007/BF00324194

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  • DOI: https://doi.org/10.1007/BF00324194

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