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Simultaneous analysis of low-Z impurities in the near-surface region of solid materials by heavy ion elastic recoil detection (HIERD)

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Abstract

A HIERD setup (HI-ERD=heavy ion elastic recoil detection) is introduced including a semiconductor Δ-E-E telescope for the detection of hydrogen and helium isotopes and a Bragg Ionization Chamber (BIC) for the identification of heavier recoils. An optimum forward scattering geometry with respect to maximum analyzable depth and sensitivity is determined experimentally as well as by calculations for the analysis of oxygen and hydrogen using 35 MeV 35Cl incident ions. As a relevant application of the method, the Na content of borosilicate glass is investigated in samples subject to anodic bonding procedures.

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Grigull, S., Behrisch, R., Kreissig, U. et al. Simultaneous analysis of low-Z impurities in the near-surface region of solid materials by heavy ion elastic recoil detection (HIERD). Fresenius J Anal Chem 353, 578–581 (1995). https://doi.org/10.1007/BF00321327

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  • DOI: https://doi.org/10.1007/BF00321327

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