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Materials Aspects of Micro- and Nanoelectromechanical Systems

  • Chapter
Springer Handbook of Nanotechnology

Part of the book series: Springer Handbooks ((SHB))

Abstract

One of the more significant technological achievements during the last twenty years has been the development of the field of microelectromechanical systems (GlossaryTerm

MEMS

) and its offshoot, nanoelectromechanical systems (GlossaryTerm

NEMS

). These developments were made possible by significant advancements in the materials and processing technologies used in the fabrication of MEMS and NEMS devices. While initial developments capitalized on a mature Si infrastructure built for the integrated circuit (GlossaryTerm

IC

) industry, recent advances have come about using materials and processes not typically associated with IC fabrication, a trend that is likely to continue as new application areas emerge.

A well-rounded understanding of MEMS and NEMS technology requires a basic knowledge of the materials used to construct the devices, since material properties often govern device performance and dictate fabrication approaches. An understanding of the materials used in MEMS and NEMS involves an understanding of material systems, since such devices are rarely constructed of a single material, but rather a collection of materials working in conjunction with each other to provide critical functions. It is from this perspective that the following chapter is constructed. This chapter is not a summary of all materials used in MEMS and NEMS, as such a work would itself constitute a single text of significant size. It does, however, present a selection of some of the more popular materials, as well as those that illustrate the importance of viewing MEMS and NEMS in terms of material systems.

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Acknowledgements

Prof. Zorman thanks Prof. Mehran Mehregany of Case Western Reserve University for his numerous contributions to this manuscript.

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  1. Dept. of Electrical Engineering & Computer Science, Case Western Reserve University, 2123 Martin Luther King Jr. Blvd., 715A Glennan Building, OH 44106, Cleveland, USA

    Christian A. Zorman

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Zorman, C.A. (2017). Materials Aspects of Micro- and Nanoelectromechanical Systems. In: Bhushan, B. (eds) Springer Handbook of Nanotechnology. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-54357-3_7

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