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Thermal Flow Sensors for Very Small Flow Rate

  • Conference paper
Transducers ’01 Eurosensors XV

Abstract

A thermal flow sensor using polysilicon thermocouples on a silicon nitride membrane is presented. The sensor has a measurement range of 2ml/h and a resolution of 10µl/h combined with a short thermal time constant of 2ms. These unique features open interesting applications in medicine and in bio-MEMS.

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References

  1. Thermal Flow Sensor for Liquids and Gases M. Ashauer, H. Glosch, F. Hedrich, N. Hey, H. Sandmaier and W. Lang Sensors & Actuators 73 1999 7–13

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  2. http://www.wagner-msr.de

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Author information

Authors and Affiliations

  1. HSG-IMIT, Wilhelm-Schickard-Str. 10, 78052, Villingen-Schwenningen, Germany

    M. Ashauer, H. Scholz, R. Briegel, H. Sandmaier & W. Lang

  2. IZFM, University of Stuttgart, Germany

    H. Sandmaier

Authors
  1. M. Ashauer
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  2. H. Scholz
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  3. R. Briegel
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  4. H. Sandmaier
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  5. W. Lang
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Editor information

Editors and Affiliations

  1. Department of Electrical Engineering & Computer Science Microsensor & Actuator Technology Secr.TIB 3.1, Berlin University of Technology, Gustav-Meyer-Allee 25, D-13355, Berlin, Germany

    Ernst Obermeier

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© 2001 Springer-Verlag Berlin Heidelberg

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Ashauer, M., Scholz, H., Briegel, R., Sandmaier, H., Lang, W. (2001). Thermal Flow Sensors for Very Small Flow Rate. In: Obermeier, E. (eds) Transducers ’01 Eurosensors XV. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_339

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  • DOI: https://doi.org/10.1007/978-3-642-59497-7_339

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-42150-4

  • Online ISBN: 978-3-642-59497-7

  • eBook Packages: Springer Book Archive

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