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Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition

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Springer Handbook of Nanotechnology

Part of the book series: Springer Handbooks ((SHB))

Abstract

In this chapter, we describe three-dimensional nanostructure fabrication using 30 keV Ga+ focused ion beam chemical vapor deposition (FIB-CVD) and a phenanthrene (C14H10) source as a precursor. We also consider microstructure plastic art, which is a new field that has been made possible by microbeam technology, and we present examples of such art, including a micro wine glass with an external diameter of 2.75 μm and height of 12 μm. The film deposited during such a process is diamond-like amorphous carbon, which has a Youngʼs modulus exceeding 600 GPa, appearing to make it highly desirable for various applications. The production of three-dimensional nanostructure is discussed. The fabrication of microcoils, nanoelectrostatic actuators, and 0.1 μm nanowiring – all potential components of nanomechanical systems – is explained. The chapter ends by describing the realization of nanoinjectors and nanomanipulators, novel nanotools for manipulation and analyzing subcellular organelles.

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Abbreviations

2-D:

two-dimensional

3-D:

three-dimensional

AFM:

atomic force microscope

AFM:

atomic force microscopy

CAD:

computer-aided design

CVD:

chemical vapor deposition

DC:

direct-current

DLC:

diamondlike carbon

EB:

electron beam

EDX:

energy-dispersive x-ray

FIB-CVD:

focused ion beam chemical vapor deposition

FIB:

focused ion beam

MOS:

metal–oxide–semiconductor

SEM:

scanning electron microscope

SEM:

scanning electron microscopy

SIM:

scanning ion microscope

TEM:

transmission electron microscope

TEM:

transmission electron microscopy

TRIM:

transport of ions in matter

a-C:

amorphous carbon

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Authors and Affiliations

  1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Hyogo, Japan

    Shinji Matsui

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  1. Shinji Matsui
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Correspondence to Shinji Matsui .

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Editors and Affiliations

  1. Ohio State University, Nanoprobe Laboratory for Bio- and Nanotechnology and Biomimetics (NLB2), 201 W. 19th Avenue, 43210-1142, Columbus, OH, USA

    Bharat Bhushan

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Matsui, S. (2010). Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition. In: Bhushan, B. (eds) Springer Handbook of Nanotechnology. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-02525-9_7

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  • DOI: https://doi.org/10.1007/978-3-642-02525-9_7

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-02524-2

  • Online ISBN: 978-3-642-02525-9

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