Abstract
Electron backscatter diffraction (EBSD) is a SEM-based method for local measurements of crystal orientations on the surface of bulk samples. It has found widespread fields of applications for microtexture analysis, phase discrimination, orientation mapping and others.
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We kindly acknowledge support by Rene de Kloe (Ametek-EDAX Tilburg) and Ellen Baken (FEI Eindhoven).
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Kunze, K., Buzzi, S., Löffler, J., Burg, J.P. (2008). Benefits of Low Vacuum SEM for EBSD Applications. In: Luysberg, M., Tillmann, K., Weirich, T. (eds) EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-85156-1_288
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DOI: https://doi.org/10.1007/978-3-540-85156-1_288
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