Abstract
This paper presents a large stroke surface micromachined micromirror platform actuated using inverse-series-connected (ISC) bimorph actuator. The proposed structure is designed using four symmetric ICS bimorph actuator made up of Aluminum and Silicon Dioxide and a micromirror plate of sandwiched layer of SiO2 and Aluminum The platform is capable of producing both piston and tip-tilt motion by application of voltage to Aluminum layer which acts as a constituent layer of ICS bimorph and an electrical heater simultaneously. With a mirror plate size of 500 × 500 µm2, the maximum displacement is 100 µm in piston mode and 69 µm in tip-tilt mode at 0.2 V. The micromirror is capable of scanning with resonance frequencies at 4.31 and 6.70 kHz in piston and torsional mode respectively.
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Acknowledgements
The author acknowledges financial assistance under RESPOND Project sponsored by SAC-ISRO and CSIR-CEERI, India.
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Kumar, A., Bansal, D., Kaur, M., Rangra, K. (2019). A Large Stroke Inverse Series Connected Electrothermal Bimorph Micromirror Platform for Optical Applications. In: Sharma, R., Rawal, D. (eds) The Physics of Semiconductor Devices. IWPSD 2017. Springer Proceedings in Physics, vol 215. Springer, Cham. https://doi.org/10.1007/978-3-319-97604-4_133
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DOI: https://doi.org/10.1007/978-3-319-97604-4_133
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