Abstract
The objective of this work is to develop a manipulator of 5 degrees of freedom for micromilling. It consists of a XY stage under a 3PRS compliant parallel mechanism, obtaining the advantages of the compliant joints as are higher repetitiveness, smoother motion and a higher bandwidth, due to the high precision demanded from the process, under 0.1 μm. In this work, the dynamics of the compliant stage will be developed. The modelling approach is based on the use of the Principle of Energy Equivalence combined with the Boltzmann-Hamel equations to analyze the rotational dynamics of the platform. A pseudo-rigid model has been assumed for the compliant joints, calculating the flexural and torsional stiffness by FEA. Finally, a prototype has been built and some preliminary results are shown comparing the simulation and the measurements.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Ahn D, Chun B, Gweon D, Kim H (2010) Development and optimization of a novel 3-DOF precision flexure stage. Proceeding of the IEEE International Conference on Nanotechnology Joint Symposium with Nano Korea. Kintex, Korea, pp 903–906
Altuzarra O, Eggers P, Campa FJ, Roldan-Paraponiaris C, Pinto C (2015) Dynamic modelling of lower-mobility parallel manipulators using the Boltzmann-Hamel equations, 3rd Conference on Mechanisms, Transmissions and Applications (MeTrApp 2015), 6–8 May
Aphale S, Moheimani S, Yong Y (2009) Design, identification, and control of a flexure-based XY stage for fast nanoscale positioning. IEEE Trans Nanotechnol 8(1):46–54
Choi Y, Kim J (2012) A millimeter-range flexure-based nano-positioning stage using a self-guided displacement amplification mechanism. Mech Mach Theory 50:109–120
Choi H, Han Ch, Wang W (2011) 2-DOF kinematic XY stage design based on flexure element. Proceeding of the IEEE International Conference on Mechatronics and Automation. Beijing, China, pp 1412–1417
Gao F, Ge Q, Yue Y, Zhao X (2010) Relationship among input-force, payload, stiffness and displacement of a 3-DOF perpendicular parallel micro-manipulator. Mech Mach Theory 45:756–771
Hao G, Kong X (2012) Design and modeling of a large-range modular XYZ compliant parallel manipulator using identical spatial modules. J Mech Rob 4:021009
Howell L (2001) Compliant mechanisms. Wiley, New York
Kenton B, Leang K (2012) Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner. IEEE/ASME Trans Mechatron, 17(2)
Li Y, Xu Q (2007) Kinematic analysis of a 3-PRS parallel manipulator. Rob Comput-Integr Manuf 23:395–408
Merlet JP (2000) Parallel Robots. Kluwer Academic Publishers, London
Acknowledgments
The authors of this paper wish to acknowledge the financial support received from the Spanish Government via the Ministerio de Economía y Competitividad (Project DPI2015-64450-R), the ERDF of the European Union, the Government of the Basque Country (Project GIC07/78, IT445-10 and SAIOTEK 2013 SAI13/245, SPC13UN011), and the University of the Basque Country (Zabalduz-2012).
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2017 Springer International Publishing Switzerland
About this paper
Cite this paper
Ruiz, A., Campa, F.J., Roldán-Paraponiaris, C., Altuzarra, O. (2017). Dynamic Model of a Compliant 3PRS Parallel Mechanism for Micromilling. In: Zentner, L., Corves, B., Jensen, B., Lovasz, EC. (eds) Microactuators and Micromechanisms. Mechanisms and Machine Science, vol 45. Springer, Cham. https://doi.org/10.1007/978-3-319-45387-3_14
Download citation
DOI: https://doi.org/10.1007/978-3-319-45387-3_14
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-45386-6
Online ISBN: 978-3-319-45387-3
eBook Packages: EngineeringEngineering (R0)