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Formation of Laser-Induced Periodic Surface Structures (LIPSS) on Dielectrics and Semiconductors upon Double-Femtosecond Laser Pulse Irradiation Sequences

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Progress in Nonlinear Nano-Optics

Abstract

The formation of laser-induced periodic surface structures (LIPSS) on different materials (silicon, fused silica, quartz) with linearly polarized fs-laser irradiation is studied experimentally. In dielectrics, the importance of transient excitation stages in the LIPSS formation is demonstrated by using (multiple) cross-polarized double-fs-laser-pulse irradiation sequences. A characteristic decrease of the spatial LIPSS periods is observed for double-pulse delays of less than 2 ps along with a characteristic 90°-rotation of the LIPSS orientation.

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Acknowledgments

The authors would like to thank M. Tischer (MBI) for taking the SEM images. This work was supported by the German Science Foundation (DFG) under grants no. RO 2074/7-1 and KR 3638/1-1.

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Correspondence to Sandra Höhm or Arkadi Rosenfeld .

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Höhm, S., Rohloff, M., Krüger, J., Bonse, J., Rosenfeld, A. (2015). Formation of Laser-Induced Periodic Surface Structures (LIPSS) on Dielectrics and Semiconductors upon Double-Femtosecond Laser Pulse Irradiation Sequences. In: Sakabe, S., Lienau, C., Grunwald, R. (eds) Progress in Nonlinear Nano-Optics. Nano-Optics and Nanophotonics. Springer, Cham. https://doi.org/10.1007/978-3-319-12217-5_5

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