Skip to main content

Problems and Trends in X-Ray Detector Design for Microanalysis

  • Chapter
X-Ray Spectrometry in Electron Beam Instruments

Abstract

This paper presents some of the problems and trends associated with silicon and germanium x-ray detectors for microanalysis as seen from the manufacturer’s point of view. The crystal and field-effect transistor FET comprise a transducer which is sensitive enough to detect charge of the order of 20–30 electron-hole pairs. At the same time, it must be fixed accurately in confined space in a hostile radiation environment and must be maintained at cryogenic temperatures without its magnetic, electrical, and mechanical properties in any way influencing the performance of the microscope to which it is interfaced. Such considerations impose severe constrictions on the design of these detectors, and many compromises must be made. For example, the demand for the low-energy efficiency afforded by a truly windowless (WL) detector is being relaxed more and more in favor of competing considerations such as protection from light, as in the ultra-thin window detector (UTW), and cross contamination and simplicity, as in the atmospheric pressure-supporting window detector (ATW).

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 219.00
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. D. E. Newbury, Microbeam Analysis 2, S180 (1993).

    Google Scholar 

  2. D. B. Williams, J. I. Goldstein, C. E. Lyman, D. W. Ackland, S. von Harrach, and P. J. Statham, Microbeam Analysis 2, S236 (1993).

    Google Scholar 

  3. A. J. Craven, C. P. M. McHardy, and K. A. Pears, Ultramicroscopy 28, 157 (1989).

    Article  Google Scholar 

  4. J.-P. Chavalier, Proc. NSF/CNRS Workshop on Electron Beam Induced Spectroscopies with High Spatial Resolution. Aussois, France, p. 231 (1988).

    Google Scholar 

  5. R. G. Musket, Nucl. Instrum. Methods B15, 735 (1986).

    CAS  Google Scholar 

  6. P. Muller, E. Riehle, E. Tegeler, and B. Wende, Nucl. Instr. Methods A247, 569 (1986).

    Google Scholar 

  7. D. D. Cohen, X-Ray Spectrom. 16, 237 (1987).

    Article  CAS  Google Scholar 

  8. P. Hoverington, G. L’Esperance, E. Baril, and M. Rigaud, Microbeam Analysis 2, 277 (1993).

    Google Scholar 

  9. M. M. El Gomati, C. G. H. Walker, B. G. Lowe, and M. Prutton, Inst. Phys. Conf. Ser. 98, 551 (1990).

    Google Scholar 

  10. M. Prutton, C. G. H. Walker, J. C. Greenwood, P. G. Kenny, J. C. Dee, I. R. Barkshire, R. H. Roberts, and M. M. El Gomati, Surf. and Interface Anal. 17, 71 (1991).

    Article  Google Scholar 

  11. R. A. Sareen, Microbeam Analysis 2, S170 (1993).

    Google Scholar 

  12. C. E. Cox, B. G. Lowe, and R. A. Sareen, IEEE Trans. Nucl. Sci. 35, 28 (1988).

    Article  CAS  Google Scholar 

  13. B. G. Lowe, Ultramicroscopy 28, 150 (1989).

    Article  Google Scholar 

  14. E. B. Steel, Microbeam Analysis (A.D. Romig, Jr. and W. E. Chambers, eds.) San Francisco, 439 (1986).

    Google Scholar 

  15. K. Kandiah and G. White, IEEE Trans. Nucl. Sci. NS-28, 613 (1981).

    Article  Google Scholar 

  16. F. S. Goulding, J. T. Walton, and D. F. Malone, Nucl. Inst. Methods 71, 273 (1969).

    Article  Google Scholar 

  17. T. Nashashibi and G. White, IEEE Trans. Nucl. Sci. 37, 452 (1990).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 1995 Springer Science+Business Media New York

About this chapter

Cite this chapter

Lowe, B.G. (1995). Problems and Trends in X-Ray Detector Design for Microanalysis. In: Williams, D.B., Goldstein, J.I., Newbury, D.E. (eds) X-Ray Spectrometry in Electron Beam Instruments. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-1825-9_2

Download citation

  • DOI: https://doi.org/10.1007/978-1-4615-1825-9_2

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-5738-4

  • Online ISBN: 978-1-4615-1825-9

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics