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Creating structures—Micromachining

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Introductory MEMS

Abstract

We have explored the nature of the silicon substrate, seen how to tailor its composition by doping it, how to deposit thin film layers, and also how to create and transfer patterns using photolithography. We next turn our attention to using the substrate, thin film deposition, and pattern transfer processes to create the actual structures that make up a MEMS device. This shaping of materials into structural elements is commonly known as micromachining.

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References and suggested reading

  • Campbell SA (1996) The Science and Engineering of Microelectronic Fabrication. Oxford University Press, New York

    Google Scholar 

  • Franssila S (2004) Introduction to Microfabrication. Wiley, Chichester, West Sussex, England

    Google Scholar 

  • Jaeger RC (2002) Introduction to Microelectronic Fabrication, 2nd edn. Prentice Hall, Upper Saddle River, NJ

    Google Scholar 

  • Madou MJ (2002) Fundamentals of Microfabrication, The Art and Science of Miniaturization, 2nd Ed. CRC Press, New York

    Google Scholar 

  • Maluf M, Williams K (2004) An Introduction to Microelectromechanical Systems Engineering, 2nd edn. Artech House, Norwood, MA

    Google Scholar 

  • Senturia S (2001) Microsystem Design. Kluwer Academic Publishers, Boston

    Google Scholar 

  • Tuckerman DB, Pease RFW (1981) High-Performance Heat Sinking for VLSI. IEEE Electron Device Lett., EDL-2:126-29

    Article  Google Scholar 

  • Wang Z (2004) Design, Modeling and Fabrication of a TiNi MEMS Heat Engine. Master’s thesis, Rose-Hulman Institute of Technology

    Google Scholar 

  • Wolf S, Tauber RN (2000) Silicon Processing for the VLSI Era, Vol.1: Process Technology, 2nd edn. Lattice Press, Sunset Beach, CA

    Google Scholar 

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Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Rose-Hulman Institute of Technology, 5500 Wabash Ave, Terre Haute, IN, 47803, USA

    Thomas M. Adams & Richard A. Layton

Authors
  1. Thomas M. Adams
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  2. Richard A. Layton
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Correspondence to Thomas M. Adams .

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© 2010 Springer Science+Business Media, LLC

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Adams, T.M., Layton, R.A. (2010). Creating structures—Micromachining. In: Introductory MEMS. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-09511-0_4

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  • DOI: https://doi.org/10.1007/978-0-387-09511-0_4

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  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-387-09510-3

  • Online ISBN: 978-0-387-09511-0

  • eBook Packages: EngineeringEngineering (R0)

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