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Physical approaches to the design of microactuators for micro- and nanopositioning: The information aspect

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Abstract

Microactuators are an important tool for precise manipulation of components and materials in nanotechnologies. The problems of design and application of microactuators for micro- and nanopositioning, microassembly, and microrobotics are considered in this paper. The basic parameters and models of piezoelectric, magnetostriction, electromagnetic, electrostatic, electrothermal, and hybrid microactuators are described. A general information approach that implies the description of physical models used in order to analyze microactuator behavior and optimize their design is considered.

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  1. VINITI, Russian Academy of Sciences, Moscow, Russia

    A. M. Petrina

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Original Russian Text © A.M. Petrina, 2011, published in Nauchno-Tekhnicheskaya Informatsiya, Seriya 2, 2011, No. 12, pp. 8–22.

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Petrina, A.M. Physical approaches to the design of microactuators for micro- and nanopositioning: The information aspect. Autom. Doc. Math. Linguist. 45, 301–315 (2011). https://doi.org/10.3103/S0005105511060069

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