Abstract
On the basis of scaling invariance of the process of random walk, a discrete three-dimensional algorithm is developed and implemented for computer simulation of the multistage processes of formation of porous clusters in a crystal matrix. A software package is worked out that provides the simulation of dynamic processes of clustering deep in the crystals with allowance for surface processes, applied external fields, and chemical reactions accompanying the processes of clustering. The morphological pattern of pores formed by the simulation is correlated with the behavior of the current-voltage characteristic of anodizing.
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Original Russian Text © A.V. Mozhaev, A.V. Prokaznikov, 2009, published in Mikroelektronika, 2009, Vol. 38, No. 5, pp. 323–330.
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Mozhaev, A.V., Prokaznikov, A.V. Computer simulation of the processes of formation of microclusters on the basis of scaling invariance of random walk. Russ Microelectron 38, 291–298 (2009). https://doi.org/10.1134/S1063739709050011
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DOI: https://doi.org/10.1134/S1063739709050011