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Studies on the structural, optical, and electrical properties of jet-nebulized spray pyrolysis ITO thin films

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Abstract

In this study, tin-doped indium oxide (ITO) thin films were fabricated via jet-nebulized spray pyrolysis method. The structural, micro structural, and optical properties of the ITO thin films were investigated via X-ray diffraction (XRD), ultraviolet–visible spectroscopy, and scanning electron microscopy (SEM). The XRD patterns of the thin films indicated a preferred orientation along the (222) plane, which ensures the formation of a pure phase with a high degree of crystallinity. The PL analysis showed that the film has a high transmittance of 80 %. The SEM observations showed the formation of dense films with grain sizes in the range of 25–50 nm. The X-ray photoelectron spectroscopy results displayed the single valance state and chemical bonding state of In and Sn in indium tin oxide. The electrical resistivity of the ITO substantially changed with the incorporation of Sn into the In2O3 structure. When 10 wt% Sn was added as a dopant, the minimum resistivity was 0.10 Ω-m.

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Authors and Affiliations

  1. Department of Physics, Arumugam Pillai Seethai Ammal College, Tiruppattur, India

    S. Marikkannu

  2. Department of Physics, Alagappa Chettiar College of Engineering and Technology, Karaikudi, India

    C. Sanjeeviraja

  3. Sustainable Energy and Smart Materials Research Lab, Department of Nanoscience and Technology, Alagappa University, Karaikudi, India

    Shakkthivel Piraman

  4. Department of Physics, Khadir Mohideen College, Adirampattinam, India

    A. Ayeshamariam

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  1. S. Marikkannu
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  2. C. Sanjeeviraja
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  3. Shakkthivel Piraman
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  4. A. Ayeshamariam
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Correspondence to A. Ayeshamariam.

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Marikkannu, S., Sanjeeviraja, C., Piraman, S. et al. Studies on the structural, optical, and electrical properties of jet-nebulized spray pyrolysis ITO thin films. J Mater Sci: Mater Electron 26, 2531–2537 (2015). https://doi.org/10.1007/s10854-015-2718-8

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  • DOI: https://doi.org/10.1007/s10854-015-2718-8

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