Abstract
Dynamic fluctuation in stress-induced leakage current – called "variable stress-induced leakage current" – in a gate oxide of a metal–oxide–semiconductor structure was investigated. Variable stress-induced leakage current is attributed to random telegraph noise, which is associated with the state-transition of a single defect. To analyze the mechanism of the state-transition, dependence of state-transition probabilities on gate current and on temperature were investigated. These dependences indicate that the state-transition mechanism is a defect-structure transition by charge collision.