Acoustic Boundary Waves Propagating along a Thin Layer between Two Bonded Substrates

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Copyright (c) 1986 The Japan Society of Applied Physics
, , Citation Toshio Irino and Yasutaka Shimizu 1986 Jpn. J. Appl. Phys. 25 130 DOI 10.7567/JJAPS.25S1.130

1347-4065/25/S1/130

Abstract

The characteristics of boundary waves propagating along a thin layer between two bonded substrates were investigated both theoretically and experimentally. The structures are PZT/ADHESIVE/PZT and PZT/ADHESIVE/GLASS. It was found that the propagation loss of the devices is greater than theoretical results because of a non-uniform adhesive layer. Therefore, the two substrates must be carefully and accurately bonded to decrease the propagation loss.

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10.7567/JJAPS.25S1.130