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  • 學位論文

界面層對GeSbTeBi碟片可加速結晶化現象的影響

Effects of interface layer on the crystallization-enhanced phenomena of GeSbTeBi disc

指導教授 : 陳適範

摘要


在相變化光碟的發展過程中,界面層是被使用來預防從ZnS-SiO2介電層中的硫原子擴散到GeSbTe的記錄層中,也可抑制硫原子移動到記錄層。此外相變化光碟的界面層可以加速記錄層材料的結晶速度,以致可以增加記錄的速度。在先前的研究當中,記錄層的兩邊堆疊著界面層有明顯於單一邊堆疊的結晶化加速的效果。這樣的結果說明在記錄層及界面層之間非均勻性的接觸表面,會形成結晶核,如此可以加速記錄層的結晶現象。 氮化物材料,如GeCrN是很廣泛的應用在可覆寫光碟片上,尤其是DVD-RAM的產品。然而在高倍速光碟的發展上,用氮化物作界面層已無法適用高倍速的需求。因此,近來氧化物被研究可取代氮化物當作界面層,以符合高倍速光碟的需求。 所以在這次的研究,則會使用GeCrN氮化物及ZrCrSiO氧化物材料作為界面層,以研究在高倍速記錄下的記錄特性及可行性的影響。

關鍵字

相變化材料 界面層

並列摘要


In the development of phase-change optical disk, the interface layer was used to prevent sulfur atom diffusing into the GeSbTe recording layer from the ZnS-SiO2 dielectric layer and suppress the atomic movement of GeSbTe layer. Furthermore, an interface layer can accelerate the crystallization rate of recording material to increase recording speed of phase change optical disk. In previous study of Yamada etc., interface layers deposited in both sides of the recording layer presents stronger accelerating effect than that in one side. This result proposes that interface layer will cause a non-uniform contact between the interface layer and recording layer to form numerous nuclei, which can enhance the crystallization of recording layer. Nitride material, such as GeCrN, is widely used in the product of rewritable optical disk, especially for DVD-RAM. However, with the development of high-speed optical disk, nitride material as an interface layer show insufficient characteristic to meet the requirement. Therefore, oxide material, such as ZrCrSiO, is recently studied to replace nitride as the interface layer for the demand of high-speed recording. In this study, GeCrN and ZrCrSiO materials are employed as the interface layer to study their effects on recording properties and feasibility at high speed recording.

並列關鍵字

DVD-RAM Phase-change GeSbTe Interface layer

參考文獻


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