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  • 學位論文

以表面活化技術提升非導電膠接合晶片與軟性基板之強度與可靠度 之驗證

Increasing the bond strength and reliability of chips and flex substrates assembly with non-conductive paste by surface activated technology

指導教授 : 莊正利
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摘要


本研究採用氬氣電漿活化處理晶片凸塊及軟性基板表面,提升晶片以非導電膠熱壓覆晶接合於軟性基板之強度,並將接合試片進行高溫儲存、高壓蒸煮、恆溫/恆濕之可靠度測試。為驗證氬氣電漿活化處理接合表面之效用,量測氬氣電漿活化處理軟性基板之表面接觸角,評估其潤濕性;以化學光譜儀分析軟性基板表面經電漿活化處理後之組成元素;以原子力顯微鏡量測試片之表面粗糙度;以剪力測試檢測晶片與軟性基板之剪力值;以電子顯微鏡與能量分析儀觀察試片接合界面、剪力測試之破斷面與其相關之組成元素,用以判斷晶片與軟性基板於剪力試驗時之破斷模式,及經可靠度試驗後接合試片失效模式之探討。 實驗結果顯示經活化處理後之晶片以非導電膠與熱壓製程可成功接合於軟性基板,且晶片凸塊與軟板間之接合界面完整未殘留非導電膠,亦未發現脫層或空孔等缺陷;經氬氣電漿活化處理後,晶片與軟板接合試片之剪力值均高於未進行表面活化處理者,藉由剪力試驗後之破斷面分析得知未經表面活化處理之接合試片,其破裂模式為晶片與非導電膠從軟性基板表面剝離,此為非導電膠與軟板之接著性不佳所致,反觀經氬氣電漿活化處理之接合試片,其斷裂發生於固化之非導電膠處,晶片與軟板表面均殘留固化之非導電膠,顯示非導電膠與軟性基板之接合強度高於固化之非導電膠強度。此一實驗結果說明氬氣電漿表面活化處理有助於提升晶片與軟性基板之接合強度,進一步分析經表面活化處理軟板表面之組成與潤濕性,可清楚發現軟板表面之汙染物降低且接觸角大幅降低,驗證氬氣電漿活化處理確實可移除軟板表面之汙染物,提高非導電膠與軟性基板之潤濕性,進而提升晶片以非導電膠接著於軟性基板之接合強度。 軟性基板經氬氣電漿活化接合試片之平均剪力值,隨高溫儲存可靠度測試時間增長而微幅降低,但整體試片之平均剪力值較軟性基板未經氬氣電漿活化者高,顯示氬氣電漿活化對軟性基板之效用,因而提升接合試片之可靠度驗證;由接合試片橫截面顯示晶片與軟性基板接著完整,證實試片仍具備較佳之平均剪力值;觀察接合試片之破斷面顯示,隨高溫儲存測試時間增長,接合試片於長期高溫影響下,因晶片金凸塊與晶片銲墊之熱膨脹係數不同,因而導致熱應力集中於金凸塊與銲墊銲點間,因此接合試片進行剪力試驗時,破斷處主要發生於晶片側之金凸塊接合處。軟性基板經氬氣電漿活化接合試片,經高壓蒸煮可靠度測試後,所得之平均剪力值隨測試時間增長而降低,由接合試片微觀結構顯示,試片長時間受到高溫、高壓、濕氣影響,致使晶片邊緣與非導電膠連接處亦產生脫層缺陷,導致試片剪力值下降;觀察接合試片之斷面,顯示其破斷模式隨高壓蒸煮測試時間增加而轉變為晶片金凸塊從晶片銲墊處銲點分離,降低試片之平均剪力值。軟性基板經氬氣電漿活化接合試片與軟性基板未經氬氣電漿活化者,經恆溫/恆濕可靠度測試後,試片平均剪力值皆隨測試時間增長而降低,經由觀察接合試片微觀結構,顯示軟性基板經氬氣電漿活化後,與非導電膠之接著性較佳,因此試片經長期濕氣、溫度之影響後,僅於晶片與非導電膠連接處觀察到脫層缺陷存在;由接合試片斷面顯示其主要破斷模式為金凸塊從晶片銲墊處斷裂,以及非導電膠從軟性基板側被剝離,隨可靠度測試時間之增加,非導電膠與軟性基板分離之破斷模式亦隨之增加,驗證接合試片平均剪力值之降低。 綜整實驗結果顯示,電漿表面活化技術確實有助於晶片與軟性基板之剪力值提升,亦增加接合試片之可靠度。

並列摘要


Argon plasma was selected to perform the surface activation on flex substrates in this study. The argon plasma activation was expected to remove the surface contaminants, and then to reduce the bonding barrier between flex substrates and the non-conductive paste (NCP). The bonding strength of chips and flex substrates assembly was thus improved. The reliability of chips and flex substrates assembly with NCP was also verified, including high temperature storage (HTS), high temperature/high humidity (HT/HH) and pressure cooker test (PCT). After flex substrates were activated with argon plasma, several analytical methods were applied to verify the effective of argon plasma activated on the bonding surface of flex substrates, such as the contact angle was measured to verify the wettability of flex substrates; the ESCA was employed to determine the compositions on the surface of flex substrates; the AFM was conducted to examine the changes of roughness on the bonding surface of flex substrates, and die-shear test was used to evaluate the bonding force of chips and flex substrates assembly. With appropriate bonding parameters, an integral bonding interface with sufficient bonding strength can be obtained for chips and flex substrates assembling using NCP and thermal compression bonding process. Neither porosity nor delamination was found at bonding interface between chips and flex substrates. The NCP can be removed from the surface of flex substrates during thermal compression bonding process, and gold bumps bonded onto flex substrates directly. In contrast to low die-shear forces for flex substrates without argon plasma activated, the die-shear force was significant enhancement for chips and flex substrates were both activated with argon plasma. A low contact angle can be determined on the surface of flex substrates, indicating the containments can be removed by argon plasma, and then a clean bonding surface was achieved for flex substrates activating with argon plasma. After die-shear test, the NCP was peeling off from the surface of flex substrates for flex substrates without activating with argon plasma, indicating the bonding strength of NCP and flex substrates is poor. For flex substrates subjected to argon plasma activation, the residual NCP can be found on the both sides of flex substrates and chips, indicating the bonding strength of NCP and flex substrates is even higher than the strength of NCP itself. These experimental results can be used to interpret that IV argon plasma activation was an effective scheme to improve the bonding strength of chips and substrates assembly using NCP and thermal compressing bonding process. After specimen subjected to the HTS test, the die-shear forces of chips and flex substrates assembly were decreased slightly with increasing the durations for they were activated with argon plasma, and the die-shear forces for flex substrates treated with argon plasma is higher than those without argon plasma activation. This experimental result indicated that argon plasma activation is an effective way to improve the reliability of HTS test for chips bonded to flex substrate with NCP and the thermal compressional boding process. As prolong the durations of HTS, the fracture occurred at bonding interface between chips and gold bumps due to the high thermal stress was formed, and then the die-shear force was decreased. The specimen of chips and flex substrates cannot withstand the high temperature, high pressure and moisture during the PCT. The delamination can be found at the corner between the chip and the NCP for specimen subjected to 96 hr PCT, and then the moisture penetrated into the bonded interface between chips and gold bumps. The NCP lost its adhesion and the gold bump peeled off from the bond pads of chips, and then the die-shear force of chips and flex substrates assembly was degraded. Similarity, the die-shear force of chips and flex substrates assembly was decreased with increasing the durations of HT/HH. A delamination can be found at bonding interface between chips and the NCP. Increasing the HT/HH durations, the major fracture mode was gold bumps peeling off from the bond pads of chips and a part of NCP peeled off from the surface of flex substrates, indicating that bonding performance among chips, NCP and flex substrates was poor. With argon plasma activation, chips can be well bonded onto flex substrates using NCP and thermal compressional bonding process and its reliability was better than those without argon plasma activation. This scheme has great potential to be applied to chips and flex substrates assembly.

參考文獻


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