In the knowledge economy ear, the value of a firm cannot be evaluated merely by the tangible assets because the company usually creates its value from the intangible assets. This study uses a structural equation model to explore the relationship between the Taiwan semiconductor industry intellectual capitals (including human capital, process capital, innovation capital and customer capital) and enterprise financial performance. The research findings indicate that human capital, process capital, innovation capital and customer capital have a significantly positive correlation with and a direct influential effect on intellectual capitals. Among them, the influence of human capital to corporate performance is the greatest. Moreover, human capital also promotes the growth of innovation and custom capital. Intellectual capital are an important indicator for measuring corporate value in the future. Managers are suggested to control and manipulate intellectual capitals, so as to increase business economic benefit, improve business competitive advantages and create shareholder value.