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  • 學位論文

自組裝波浪型結構應用於可調變光學濾波器及奈米投影曝光製作週期性金屬/介電材料孔洞陣列

Application of Self-Assembled Rippling Structure to Tunable Optical Filter Devices and Nanoprojection Lithography for Manufacturing Periodic Metal/Dielectric Hole Arrays

指導教授 : 李嗣涔

摘要


本論文主要研究在聚二甲基矽氧烷(PDMS)基板製作出週期性的銀金屬波浪結構,且波浪結構的週期可以藉由沉積的銀金屬厚度來控制。這樣彈性伸縮的金屬光柵激發了銀/空氣的表面電漿模態,我們可以藉由外加應力的拉伸進而改變此共振波長達到3.5%,實驗證實這樣的可調變光學濾波元件的確有發展的可能性。 此外,我們提出一個創新的奈米投影曝光顯影技術來製造表面電漿奈米柵欄。因為可藉由減小上層透光薄膜層的厚度而使PDMS基板的週期性波浪結構縮小至奈米尺度,這種自組裝形成波浪型結構的彈性PDMS基板可以作為干涉模板,並由製成時施加的應變來決定波浪型結構的週期及振幅。此技術可製造出所需的尺寸大小及操作波長的表面電漿柵欄耦合器,並能藉由可改變週期的干涉模板來快速製作大面積的表面電漿奈米柵欄。 最後利用奈米投影曝光顯影技術在玻璃基板上製造大面積週期性金屬/介電材料的長方形孔洞陣列,並量測垂直方向入射光在穿透不同比例長方形矩陣銀薄膜孔洞的穿透情形,顯示出隨著長寬比的增加會使得共振峰值朝向長波長移動,以及使得共振峰值變寬。

並列摘要


It is demonstrated that a periodic metallic wavy-structure can be easily fabricated on elastomeric polydymethylsiloxane (PDMS) substrates. The period of the wavy-structure is controllable by varing the thickness of the deposited silver film. The elastomeric-gratings can excite surface plasmon on Ag/air interfaces, the resonant wavelength can be tuned to a range of 3.5% by applying an external mechanical strain. Our experiments demonstrate the possibility of a new type optical filter with tunable wavelengths. In addition, a new nanoprojection lithography (NPL) is proposed to manufacture plasmonic nanogratings. The period of the wavy-structure on PDMS substrates could be decreased to nanometer scale after decreasing its thickness of the different upper light-penetrable ultra-thin film layer. Hence, a low-cost, self-assembly, elastomeric PDMS wavy-structures are used as the interference modules, with their periods and amplitudes largely controlled by the applied mechanical strain in the synthesis process. Well-defined plasmonic grating couplers with desired feature sizes and wavelengths of operation were obtained. Moreover, this NPL may enable large-area and flash manufacturing of plasmonic nanogratings with tunable array periods. Finally, manufacturing large-area periodic metal/dielectric rectangular hole arrays on glass substrate are achieved using this NPL technology. The transmission for normal incident light through a silver film perforated with rectangular hole arrays with different aspect ratio are measured. It shows that resonance peak shifts to long wavelength and becomes broader by increasing the value of the aspect ratios.

參考文獻


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