Mechanical Properti es of ZnO:Mo Transparent Conducting Oxide Thin Film Prepared by Sputtering

In this study, molybdenum doped zinc oxide (ZnO:Mo, MZO) transparent conductive films were prepared by using pulsed DC magnetron sputtering on glass substrates. The mechanical properties of MZO films under various film preparation parameters were investigated. Experimental results show that the amount of Mo doping with 1.81 wt % has the highest elastic modulus and hardness. The hardness of MZO film increased in conjunction with the deposition power, film thickness, and substrate temperature. The elastic modulus of MZO film increased in conjunction only with the deposition power and film thickness. The elastic modulus or hardness of MZO film is a function of the tilt angle of the crystal deposited. The values of the elastic modulus of the MZO films are in the range 110 ~ 130 GPa.

並列關鍵字

無資料

參考文獻

S. Choi, G. Shin, H. Byum, S. G. Oh, and S. Lee, Surf. Coat. Technol. 169{170, 557 (2003).

T. Minami, H. Sato, H. Nanto, and S. Takata, Jpn. J. Appl. Phys. 24, L781 (1985).

K. Ellmer, J. Phys. D 33, R17 (2000).

E. M. Bachari, G. Baud, S. Ben Amor, and M. Jacquet, Thin Solid Films 348, 165 (1999). doi: 10.1016/S0040-6090(99)00060-7

S. Major, S. Kumar, M. Bhatnagar, and K. L. Chopra, Appl. Phys. Lett. 49, 394 (1986).

Google Scholar

被引用紀錄

周雨彤（2014）。具非均質麻田散鐵薄膜基材系統之微結構模擬〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2014.01528

許啟彬（2011）。電腦輔助人工膝關節術後定位與磨損分析之技術發展〔博士論文，國立中央大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0031-1903201314431456

國際替代計量

Mechanical Properti es of ZnO:Mo Transparent Conducting Oxide Thin Film Prepared by Sputtering

全文下載

主題瀏覽