Korean Journal of Air-Conditioning and Refrigeration Engineering (설비공학논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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An Assessment of Energy Consumption in Steam-Humidification- and Water-Spray-Humidification-Type Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms

반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 에너지소비량 평가

  • Kim, Ki-Cheol (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Song, Gen-Soo (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Kim, Hyung-Tae (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Yoo, Kyung-Hoon (Nanoscale Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
  • Shin, Dae-Kun (Daehan PNC Co.) ;
  • Park, Dug-Jun (Shinsung ENG Co.)
  • 김기철 (한국생산기술연구원 나노오염제어연구실) ;
  • 송근수 (한국생산기술연구원 나노오염제어연구실) ;
  • 김형태 (한국생산기술연구원 나노오염제어연구실) ;
  • 유경훈 (한국생산기술연구원 나노오염제어연구실) ;
  • 신대건 ((주) 대한피엔씨) ;
  • 박덕준 ((주) 신성이엔지)
  • Received : 2012.10.30
  • Published : 2013.02.10
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Abstract

For a large-scale semiconductor manufacturing clean room, the energy consumed in an outdoor air conditioning system to heat, humidify, cool and dehumidify incoming outdoor air is very large. In particular, the energy requirement to humidify outdoor air in the winter season is generally known to be high. Recently, in order to overcome the high energy consumption nature of a steam generator in a conventional steam humidification type outdoor air conditioning system, an air washer is often introduced instead of the steam generator in the outdoor air conditioning system, which can be called a water spray humidification type outdoor air conditioning system. Therefore, the assessment and comparison of the annual energy consumed in the steam humidification type and the water spray humidification type outdoor air conditioning systems deserves to be examined in order to reduce the outdoor air conditioning load of a clean room. In the present study, a numerical analysis was conducted to obtain the annual electric power consumption of the two outdoor air conditioning systems. It was shown from the comparison of the numerical results that the water spray humidification type outdoor air conditioning system can reduce about 30% of annual electric power consumption of the steam humidification type outdoor air conditioning system.

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References

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