Strain Evaluation and Fracture Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared Membrane

Ruggero Anzalone; Giuseppe D'Arrigo; Massimo Camarda; Nicolo’ Piluso; Francesco La Via

doi:10.4028/www.scientific.net/MSF.806.11

Paper Titles

Preface and Conference Committees

3C-SiC: New Interest for MEMS Devices
p.3

Strain Evaluation and Fracture Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared Membrane
p.11

Buffer Layer Optimization for the Growth of State of the Art 3C-SiC/Si
p.15

Analysis on 3C-SiC Layer Grown on Pseudomorphic-Si/Si_1-xGe_x/Si(001) Heterostructures
p.21

Ge Assisted 3C-SiC Nucleation and Growth by Vapour Phase Epitaxy on On-Axis 4H-SiC Substrate
p.27

Heteroepitaxy of P-Doped 3C-SiC on Diamond by VLS Transport
p.33

SiC NWs Grown on Silicon Substrate Using Fe as Catalyst
p.39

Investigation of Aluminum Incorporation in 4H-SiC Epitaxial Layers
p.45

HomeMaterials Science ForumMaterials Science Forum Vol. 806Strain Evaluation and Fracture Properties of...

Strain Evaluation and Fracture Properties of Hetero-Epitaxial Single Crystal 3C-SiC Squared Membrane

Abstract:

The following paper explores the development the bulge test technique combined with the micro-Raman analysis and a refined load-deflection model for high quality 3C-SiC squared-membranes. By the minimization of the total elastic energy, starting from the isotropic relation between the stress tensor and the strain tensor, it is possible to calculate the relationship between the maximum deflection and the applied pressure, in both regime of small and large deflection. From the measured breaking pressure through the refined model it is possible to evaluate the breaking strain of the membrane. Furthermore, the relationship between the measured shift of Raman Transverse Optical (TO) phonon modes and the total residual strain (Δa/a) within the epitaxial 3C-SiC layer was found.

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Periodical:

Materials Science Forum (Volume 806)

Pages:

11-14

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.806.11

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Online since:

October 2014

Authors:

Ruggero Anzalone*, Giuseppe D'Arrigo, Massimo Camarda, Nicolo’ Piluso, Francesco La Via

Keywords:

3C-SiC Membrane, Bulge Test, Optical Parameters, Young's Modulus

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