Characterization of SiC Substrates Using X-Ray Rocking Curve Mapping

Murugesu Yoganathan; Ejiro Emorhokpor; Thomas Kerr; A. Gupta; C.D. Tanner; Ilya Zwieback

doi:10.4028/www.scientific.net/MSF.527-529.729

Paper Titles

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Simple, Calibrated Analysis and Mapping of SiC Wafer Defects by Birefringence Imaging
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SiC Substrate Doping Profiles Using Commercial Optical Scanners
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Characterization of SiC Substrates Using X-Ray Rocking Curve Mapping
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Microwave Dielectric Loss Characterization of Silicon Carbide Wafers
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Columnar Pore Growth in n-Type 6H SiC
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A Comparison of Various Surface Finishes and the Effects on the Early Stages of Pore Formation during High Field Etching of SiC
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Brillouin Spectra of Porous p-Type 6H-SiC
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HomeMaterials Science ForumMaterials Science Forum Vols. 527-529Characterization of SiC Substrates Using X-Ray...

Characterization of SiC Substrates Using X-Ray Rocking Curve Mapping

Abstract:

SiC substrates produced at II-VI, Inc. have been characterized using x-ray rocking curve mapping (topography). The rocking curves have been measured in the -scan mode for the (0006) Bragg reflection of 6H and the (0004) reflection of 4H SiC substrates. The maps contain information extracted from the rocking curves, such as the peak angle () and the rocking curve broadening (FWHM). In the case when lattice distortion is present due to the elastic or plastic deformation, the peak angle () changes gradually upon scanning, with the d/dx gradient proportional to the lattice curvature in the plane of diffraction. Multi-peak reflections and/or sharp change in the value of indicate the presence of misoriented grains. X-ray rocking curve mapping of SiC substrates yields excellent measures of crystalline quality that contain important information on the lattice strain and sub-grain misorientation.

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Silicon Carbide and Related Materials 2005

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Periodical:

Materials Science Forum (Volumes 527-529)

Pages:

729-732

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.527-529.729

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Online since:

October 2006

Authors:

Murugesu Yoganathan, Ejiro Emorhokpor, Thomas Kerr, A. Gupta, C.D. Tanner, Ilya Zwieback

Keywords:

Broadening, Lattice Tilt, Mapping, Misorientation, Rocking Curve, X-Ray Diffraction (XRD)

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References

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