Optical Absorption Peculiarities of Al-Si-N Coatings Produced by Magnetron Sputtering

Alexandr V. Kabyshev; Fedor V. Konusov; Alexander L. Lauk; Alexey M. Lebedinskiy; Victor N. Legostaev; Egor A. Smolyanskiy

doi:10.4028/www.scientific.net/KEM.712.3

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Optical Absorption Peculiarities of Al-Si-N Coatings Produced by Magnetron Sputtering
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 712Optical Absorption Peculiarities of Al-Si-N...

Optical Absorption Peculiarities of Al-Si-N Coatings Produced by Magnetron Sputtering

Abstract:

In this paper the optical absorption characteristics of Al–Si–N coatings, deposited by magnetron sputtering on the substrates from silicon single crystals and glass were studied. The influence of conditions deposition on optical properties has been determined. The characteristics of interband and exponential absorption are determined by influence of localized states (LS) of defects continuously distributed in the band gap (BG) and reflect the influence on properties of crystalline and amorphous components material of coatings. The interband absorption is realized via the allowed indirect transitions through the optical gap 2.7–2.8 eV and direct transitions through the gap 3.8–3.96 eV. The interrelations between the parameters of interband and exponential absorption are typical for the naterials, whose properties are determined by a static and/or dynamic disordering of the crystal lattice by the defects of a different nature. Maximal average value of the BG width is 4.8–5.1 eV in the scope of semiclassical analysis applied to amorphous and strongly defective materials. The optical parameters of deposited coatings are changed in correlation with a changing of the mechanical characteristics in dependency on the nitrogen pressure.

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Periodical:

Key Engineering Materials (Volume 712)

Pages:

3-8

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.712.3

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Online since:

September 2016

Authors:

Alexandr V. Kabyshev, Fedor V. Konusov*, Alexander L. Lauk, Alexey M. Lebedinskiy, Victor N. Legostaev, Egor A. Smolyanskiy

Keywords:

Al-Si-N Coatings, Magnetron Sputtering, Mechanical Properties, Optical Properties

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* - Corresponding Author

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