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HomeJournal of Nano ResearchJournal of Nano Research Vol. 48Structural Examination of Multilayer CrAlSiN/AlSiN...

Structural Examination of Multilayer CrAlSiN/AlSiN Coatings Deposited by Cathodic Arc

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Abstract:

In this research, the possibility of applying multilayer multielement super hard coatings by Cathodic Arc is investigated. More precisely the structure of the coating consisting of quaternary CrAlSiN and ternary AlSiN layers is examined by electron microscopy, X-ray diffraction and X-ray photoelectron microscopy analytical methods. The as-deposited samples were found to have distinguishable layers. The CrAlSiN layer is characterized by an extra sequence of repeated nanolayers. The AlSiN layer consisted of nanosized grains having a preferential orientation. Finally the surface layer was found to contain a solid solution of CrxAl1-xN, while Si3N4was identified only by XPS most probably due to its amorphous structure.

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Journal of Nano Research Vol. 48

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Periodical:

Journal of Nano Research (Volume 48)

Pages:

62-70

DOI:

https://doi.org/10.4028/www.scientific.net/JNanoR.48.62

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Online since:

July 2017

Authors:

D. Chaliampalias, Nikolaos Pliatsikas, Eleni Pavlidou, Lilyana Kolaklieva, Roumen Kakanakov, Nikolaos Vouroutzis, Panos Patsalas, G. Vourlias, Efstathios K. Polychroniadis*

Keywords:

Cathodic Arc Deposition, Electron Microscopy, Hard Coatings, Multilayer Films, Transition Metals, XPS

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* - Corresponding Author

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