Repairing Damage on Ground Fused Silica by CO2 Laser Irradiation
p.401
p.401
An Investigation of Attachment on Electrode Surface in Dry EDM
p.407
p.407
Investigation of Eco-Friendly Fixed-Abrasive Polishing with Compact Robot
p.415
p.415
High-Integrity Finishing of 4H-SiC (0001) by Plasma-Assisted Polishing
p.423
p.423
A Review on the CMP of SiC and Sapphire Wafers
p.429
p.429
Polyline Dwell Time Algorithm for Every Type of Tool Path for Ultrasonic-Magnetorheological Combined Finishing
p.435
p.435
Odor Suppression of Putrid Water-Soluble Coolant Using Home Ion Generator
p.441
p.441
Study the Rheological Properties of Abrasive Gel with Various Passageways in Abrasive Flow Machining
p.447
p.447
Processing Characteristics of Structured Lapping Films under Grinding Load Control
p.457
p.457
A Review on the CMP of SiC and Sapphire Wafers
Abstract:
Chemo-mechanical polishing (CMP) has been a useful method to produce superior brittle wafer surfaces. This paper reviews the CMP of silicon carbide and sapphire wafers, focusing on efficiency of the polishing rate. The effects of slurry type, slurry pH value and mixed abrasives will be discussed in detail.
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Info:
Periodical:
Advanced Materials Research (Volumes 126-128)
Pages:
429-434
Citation:
Online since:
August 2010
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