Mechanism of PVA Brush Loading with Ceria Particles during Post-CMP Cleaning Process

Samrina Sahir; Hwi Won Cho; Nagendra Prasad Yerriboina; Tae Gon Kim; Satomi Hamada; Jin Goo Park

doi:10.4028/www.scientific.net/SSP.314.259

Paper Titles

The Effect of Thermal Aging on Nano-Particle Removal
p.228

Contact Vs. Non-Contact Cleaning: Correlating Interfacial Reaction Mechanisms to Processing Methodologies for Enhanced FEOL/BEOL Post-CMP Cleaning
p.237

Effect of Viscosity on Ceria Abrasive Removal in the Buffing CMP Process
p.247

Nodule Deformation of PVA Roller Brushes on a Rotating Plate: Optimum Cleaning for Nanosized Particles due to Liquid Absorption and Desorption of Sponge Deformation
p.253

Mechanism of PVA Brush Loading with Ceria Particles during Post-CMP Cleaning Process
p.259

Tribological Characterization of Anionic Supramolecular Assemblies in Post-STI-CMP Cleaning Solution Using a Novel Post-CMP PVA Brush Scrubber
p.264

Effect of Dissolved Oxygen on Removal of Benzotriazole from Co during a Post-Co CMP Cleaning
p.270

Removal of Post Etch Residue on BEOL Low-K with Nanolift
p.277

Copper Catalysis Effect Investigation for TiW Etch Process on Patterned Wafers
p.282

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Mechanism of PVA Brush Loading with Ceria Particles during Post-CMP Cleaning Process

Abstract:

Brush scrubbing is a well-known post CMP cleaning process. Interaction between PVA brush and the particles removed during the process must be considered while designing a cleaning process. In this work, the effect of cleaning solution pH was investigated in terms of particle removal from the wafer and subsequent loading to the PVA brush nodule. Higher cleaning of particles from wafer was observed for pH 2 and 12 cleaning solutions and poor cleaning for pH 7 cleaning solution. In contrast, the brushes were loaded heavily for pH 7 compared to pH 2 and 12. Higher electrostatic attraction between oppositely charged PVA and ceria surfaces provided higher ceria particles loading to PVA brush in acidic and neutral cleaning solutions. This particle loading to PVA brush can further effect cleaning efficiency as well as cross-contamination.