Femtosecond Laser Micromachining of SiC Ceramic Structures

Xiao Chen Gai; Zhi Wei Dong; Qing Liang Zhao; Hong Bin Liu

doi:10.4028/www.scientific.net/MSF.770.21

Paper Titles

Experimental Study on Wear and Fracture of Ball-End Milling Cutter in High Speed Machining Stainless Steel 0Cr13Ni4Mo
p.3

Experimental Study on the Influence of Cutting Parameters on Thread Precision of External Thread Turning
p.7

Experimental Study on Low Alloy TRIP Steel Grinding Ball
p.13

FE Analysis of Stress Concentrations in Composite Plates with Multiple Holes for Zigzag Multi-Fastened Joints
p.17

Femtosecond Laser Micromachining of SiC Ceramic Structures
p.21

Finite Analysis of Cutting Temperature with Internal Lubricating Tool
p.25

Finite Element Simulation of Electromagnetic Properties of Ferrite Material
p.29

Grinding Force and Specific Energy in Plunge Grinding of 20CrMnTi with Monolayer Brazed CBN Wheel
p.34

High-Speed Turning of Titanium Matrix Composites with PCD and Carbide Tools
p.39

HomeMaterials Science ForumMaterials Science Forum Vol. 770Femtosecond Laser Micromachining of SiC Ceramic...

Femtosecond Laser Micromachining of SiC Ceramic Structures

Abstract:

Femtosecond laser micromachining technology shows abroad application background in the field of micro manufacturing due to its unique advantages, especially for micromachining of ultrahard materials such as Silicon carbide (SiC) ceramic. The femtosecond laser micromachining system was set up, by using the system, effects of scanning velocity and laser pulse energy on quality of micromachined features were evaluated. The optimized technological parameter was obtained as 8mW, 1mm/s with 1kHz repetition frequency respectively on the basis of the morphological characteristics and microstructure accuracy. Besides, V-shaped cavity of 300μm depth and 120°angle was generated with layer-by-layer scan machining. Thus femtosecond laser micromachining technology is an effective method for hard and brittle materials precision processing.