[1]
G. Hass, J. E Waylonis, Optical constants and reflectance and transmittance of evaporated aluminum in the visible and ultraviolet, JOSA. 51 (1961), 719-722.
DOI: 10.1364/josa.51.000719
Google Scholar
[2]
H. V. Nguyen, Ilsin An,R. W. Collins, Evolution of the optical function of aluminum films during nucleation and growth determined by real-time spectroscopic ellipsometry, Phys. Rev. Lett. 68 (1992) 994-997.
DOI: 10.1103/physrevlett.68.994
Google Scholar
[3]
H. Monard, F. Sabary, Optical properties of silver, gold and aluminum ultra-thin granular films evaporated on oxidized aluminum, Thin Solid Films. 310 (1997) 265-273.
DOI: 10.1016/s0040-6090(97)00331-3
Google Scholar
[4]
Hao Du, Jin Quan Xiao, You Sheng Zou et al., Optical properties of ultrathin aluminum films deposited by magnetron sputtering in visible band, Opt. Mater. 28 (2006) 944-949.
DOI: 10.1016/j.optmat.2005.04.011
Google Scholar
[5]
Shiuh Chuan Her, Yi Hsiag Wang, Effect of temperature and humidity on the optical property of aluminum films, Appl. mechanics and materias. 3930 (2010) 121-126.
Google Scholar
[6]
Sung-Hwa Kim, Chang Kwon Hwangbo, Influence of Ar ion-beam assistance and annealing temperatures on properties of Tio2 thin films deposited by reactive DC magnetron sputtering, Thin Solid Films. 475 (2005) 155-159.
DOI: 10.1016/j.tsf.2004.08.035
Google Scholar
[7]
W. Ensinger, Low energy ion assist during deposition – an effective tool for controlling thin film microstructure, Nuc. Instrum. and Methods Phys. Res. Sect. B. 127-128 (1997) 796-808.
DOI: 10.1016/s0168-583x(97)00010-4
Google Scholar
[8]
Michal Novotny, Jiri Bulir, Jan Lancok et al., In-situ monitoring of the growth of nanostructured aluminum thin film, Journal of Nanophotonics. 5 (2011) 051503-1÷051503-10.
DOI: 10.1117/1.3543816
Google Scholar
[9]
Hien V. Nguyen, Ilsin An, R.W. Collins, Evolution of the functions of thin-film aluminum: A real-time spectroscopic ellipsometry, Phys. Rev. B. 47 (1993) 3947-3965.
DOI: 10.1103/physrevb.47.3947
Google Scholar
[10]
Philip Martin, Roger Netterfield, Terry Kinder et al., Optical properties and stress of ion-assisted aluminum nitride thin films, Appl. Opt. 31 (1992) 6734-6740.
DOI: 10.1364/ao.31.006734
Google Scholar
[11]
Oleg Asainov, Sergey Umnov, Increased ultraviolet reflectivity of magnetron deposited Al films, The 7th International Forum on Strategic Technology IFOST2012 September 17-21, Vol. I (2012) 292-295 (doi: 10. 1109/IFOST. 2012. 6357554).
DOI: 10.1109/ifost.2012.6357554
Google Scholar