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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 749Study of Yb-Doped CoSb3 Thermoelectric Thin Films...

Study of Yb-Doped CoSb₃ Thermoelectric Thin Films Prepared by Laser

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Abstract:

Thin films of Yb filled CoSb₃ were prepared on fused silica substrates using pulsed laser deposition method. The stoichiometric Yb_0.19Co₄Sb₁₂ target was prepared by hot pressing method. The deposition conditions were changed with the goal to reach layers of smooth morphology. The target-to substrate distance was kept equal to 4 cm. The ambient argon pressure moved from 0.5 Pa to 13 Pa, laser repetition rate from 3 Hz to 10 Hz, and substrate temperature from 250 °C to 400 °C. We tested laser fluencies from 0.8 J·cm^-2 to 5 J·cm^-2. Films roughness was determined by mechanical profilometer and by atomic force microscopy. The lowest roughness of about 5 nm – 10 nm was reached for low laser fluencies but mechanical quality of films was poor and growth rate low (about 0.1 A/pulse). From WDX analysis follows that there is an excess of Yb and Sb compared to Yb_0.19Co₄Sb₁₂ target.

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Periodical:

Applied Mechanics and Materials (Volume 749)

Pages:

46-50

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.749.46

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Online since:

April 2015

Authors:

Miroslav Jelínek, Radek Zeipl, Tomáš Kocourek, Jan Remsa, Karel Jurek, Jiří Navrátil

Keywords:

PLD, Skutterudite, Thin Films, YbCoSb

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