Design and Analysis of Multilayer Semiconductor Sensor for Acetone Gas Sensing

Jian Yu Fu; Di Wu; Bo Tian Zhou; Ye Yuan; Hu Yong Yan

doi:10.4028/www.scientific.net/AMM.687-691.1113

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 687-691Design and Analysis of Multilayer Semiconductor...

Design and Analysis of Multilayer Semiconductor Sensor for Acetone Gas Sensing

Abstract:

Portable breath acetone sensor has great potential in diabetes diagnosis for acetone is a selective breath maker for diabetes. In this paper, we propose a multilayer semiconductor sensor for acetone gas sensing. Device is designed with stress adjustment layer, support layer, metal layer, insulator and sensing film. Simulation is performed, electrothermal and thermomechanical analyses demonstrate that this device has good performance in power consumption and thermomechanical reliability.

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Periodical:

Applied Mechanics and Materials (Volumes 687-691)

Pages:

1113-1116

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.687-691.1113

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Online since:

November 2014

Authors:

Jian Yu Fu*, Di Wu, Bo Tian Zhou, Ye Yuan, Hu Yong Yan

Keywords:

Breath Acetone Detection, Finite Element Analysis (FEA), Microheater, Semiconductor Sensors

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* - Corresponding Author

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