Synthesis of Transparent Conductive Coating In2O3:Sn Films from Film Forming Solutions

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Materials based on films In2O3:Sn found commercial use as optical materials because of their high reflectance in infra red radiation and transmittance in visible spectrum. This paper investigates effects of treatment of glass substrates with acid (СН3COOH), basic (NaOH) etchants and an etchant having oxidation ability and acidic properties (chromic mixture) on optical properties of films In2O3:Sn proposed for solar cells and LEDs. The resulting films are characterized by high transparency 75-90% in visible spectrum for the values ​​of refractive index 1.82-1.90. Substrate treating effect on thickness, resistance and transparency of the films is described. Morphology and optical properties of the films were studied by three-dimensional non-contact profilometry, spectrophotometry and ellipsometry.

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401-404

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October 2014

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[1] G.G. Untila, T.N. Kost, A.B. Chebotareva, M.A. Timofeyev, Effect of tin content on composition and optical and electrical properties of ITO films deposited onto silicon and glass by ultrasonic spray pyrolysis, Semiconductors. 46, 7 (2012) 962-968.

DOI: 10.1134/s1063782612070202

Google Scholar

[2] Zhend Jiao, Minghong Wu, Jianzhong Gu, Xilian Sun, Gas sensing characteristics of ITO thin film prepared by sol-gel method, Sensors and Actuators B. 94 (2003) 216–221.

DOI: 10.1016/s0925-4005(03)00343-5

Google Scholar

[3] D.M. Mattox, Sol-gel derived, air-baked indium and tin oxide films, Thin Solid Films. 204 (1991) 25–32.

DOI: 10.1016/0040-6090(91)90491-f

Google Scholar

[4] Qiang Wei, Haixing Zheng, Yuhong Huang, Direct patterning ITO transparent conductive coatings, Solar Energy Materials and Solar Cells. 68 (2001) 383–390.

DOI: 10.1016/s0927-0248(00)00370-6

Google Scholar

[5] Kentaro Utsumi, Osamu Matsunaga, Tsutomu Takahata, Low resistivity ITO film prepared using ultra high density ITO target, Thin Solid Films. 334 (1998) 30–34.

DOI: 10.1016/s0040-6090(98)01111-0

Google Scholar

[6] C. Goebbert, H. Bisht, N. Al-Dahoudi, R. Nonninger, M.A. Aegerter, H. Schmidt, Wet chemical deposition of crystalline, redispersable ATO and ITO nanoparticles, Journal of Sol-Gel Science and Technology. 19 (2000) 201–204.

DOI: 10.1023/a:1008728103512

Google Scholar

[7] J.J. Xu, A.S. Shaikh, R.W. Vest, Indium tin oxide thin films from metallo-organic precursors, Thin Solid Films. 161 (1988) 273–280.

DOI: 10.1016/0040-6090(88)90259-3

Google Scholar

[8] A. Gurlo, M Ivanovskaya, A. Pfau, U. Weimar, W. Gopel, Sol-gel prepared In2O3 thin films, Thin Solid Films. 307 (1997) 288–293.

DOI: 10.1016/s0040-6090(97)00295-2

Google Scholar

[9] Keishi Nishio, Tadanori Sei, Toshio Tsuchiya, Preparation and electrical properties of ITO thin films by dip-coating process, Journal of Materials Science. 31 (1996) 1761–1766.

DOI: 10.1007/bf00372189

Google Scholar

[10] Osamu Yamamoto, Tadashi Sasamoto, Michio Inagaki, Indium tin oxide thin films prepared by thermal decomposition of ethylene glycol solution, J. Mater. Res. 7, 9 (1992) 2488–2491.

DOI: 10.1557/jmr.1992.2488

Google Scholar

[11] Seon-Soon Kim, Se-Young Choi, Chan-Gyung Park, Hyeon-Woo Jin, Transparent conductive ITO thin films through sol-gel process using metal salts, Thin Solid Films. 347 (1999) 155–160.

DOI: 10.1016/s0040-6090(98)01748-9

Google Scholar

[12] S.A. Kuznetsova, L.P. Borilo Obtaining sol-gel y means of indium oxide thin films with added tin on glass substrates / Glass and Ceramics. – 2014. – Vol. 70. – № 3. – pp.429-433.

DOI: 10.1007/s10717-014-9595-0

Google Scholar

[13] S.A. Kuznetsova, I.A. Senokosova Film-formation capacity of alcoholic solutions of iron(III) chloride with acetylacetone, Russian Journal of Applied Chemistry. 83, 11 (2010) 1935–(1939).

DOI: 10.1134/s1070427210110078

Google Scholar