[1]
M. Yang, T. Aizawa, S. Nakano, K. Ito, Development of precise micro press forming system for fabrication of micro parts, Proc. 10th International Conference on Technology of Plasticity: 1093-1096.
Google Scholar
[2]
MITI, Vision of future optical industries in future, 2004: 123-128.
Google Scholar
[3]
N. Abolhassani et al., Needle insertion into soft tissue: A survey, Medical Engineering & Physics, 2007; 29: 413-431.
DOI: 10.1016/j.medengphy.2006.07.003
Google Scholar
[4]
I. Etsion, Improving tribological performance of mechanical components by laser surface texturing, Tribology Letters, 2004; 17, No. 4: 733–737.
DOI: 10.1007/s11249-004-8081-1
Google Scholar
[5]
A. Balden, Adhesively bonded joints and repairs in metallic alloy, polymers and composite materials: adhesives, adhesion theories and surface pretreatment, Journal of Materials Science, 2004; vol. 39: 1-49.
DOI: 10.1023/b:jmsc.0000007726.58758.e4
Google Scholar
[6]
J. Cao, et al., Micro-forming: experimental investigation of the extrusion process for micro-pins and its numerical simulation by RKEM, ASEM Journal of Manufacture Science and Engineering, 2004, 126: 642-652.
DOI: 10.1115/1.1813468
Google Scholar
[7]
M. Sahli, J-C. Gelin, T. Barriere, Mixing and characterization of copper feedstock for hot embossing process and its application to metallic mold replication, Proc. 7th International Conference on Micro-Manufacturing, 2012: 526-533.
Google Scholar
[8]
B. Denkena, J. Koehler, J. Kaestner, Efficient machining of micro-dimples for friction reduction, Proc. 7th International Conference on Micro Manufacturing, 2012: 85-89.
Google Scholar
[9]
Y. Jiang, W.S. Zhao, X.M. Kang, L. Gu, Adaptive control for micro-hole EDM process with wavelet transform detecting method, Proc. 6th International Conference on Micro-Manufacturing, 2011: 207-211.
Google Scholar
[10]
J. Heneka, M. Guttmann, T. Hanemann, K. Plewa, V. Saile, LIGA-mold inserts for industrial use, Proc. 7th International Conference on Micro-Manufacturing, 2012: 329-331.
Google Scholar
[11]
M.J. Lukitsch, A.T. Alpas, Tribological behavior of aluminum against tungsten doped DLC at elevated temperature, Abstract of ICMCTF-2011, 2011; 43.
Google Scholar
[12]
J. Fontaine, R.W. Carpick, S.V. Prasad, T. Lemogne, S. Bec, Super-low friction of SiOx-doped DLC coatings under oxygen and hydrogen ambients, " Abstract of ICMCTF-2011, 2011; 103.
Google Scholar
[13]
http: /www. htw-gemany. com/, 2012. 11. 5.
Google Scholar
[14]
T. Aizawa, Y. Sugita, High-dense plasma technology for etching and ashing of carbon materials, Research Report of Shibaura Institute of Technology, 2011, 55 (2); 13-22.
Google Scholar
[15]
T. Aizawa, Micro-patterning onto diamond like carbon coating via RF-DC oxygen plasma etching, Proc. 5th SEATUC Symposium (Hanoi), 2011: 425-428.
Google Scholar
[16]
T. Aizawa, N. T, Redationo, E. E. Yunata, Plasma etching with metallic masking for micro-patterning onto DLC coated mold-dies, " Proc. 4th Asian Forum on Micro Forming (Toyohashi), 2011: 19-20.
DOI: 10.1051/mfreview/2015015
Google Scholar
[17]
T. Aizawa, T. Fukuda, Micro-patterning onto carbon-based coatings via oxygen plasma etching, Research Report of Shibaura Institute of Technology, 2012; 56 (2): 47-56.
Google Scholar
[18]
T. Aizawa, T. Inohara, Micro-texturing onto glassy carbon substrates by multi-axially controlled pico-second laser machining, Proc. 7th ICOMM Conference (Chicago), 2011: 66-73.
Google Scholar
[19]
T. Aizawa, T. Iohara, Japan Patent with the contract number of #2011-212046, (2011).
Google Scholar
[20]
T. Aizawa, T. Inohara, Multi-dimensional micro-patterning onto ceramics by pico-second laser machining, Research Report of Shibaura Institute of Technology, 2012; 56 (1): 17-26.
Google Scholar
[21]
T. Aizawa, T. Fukuda, Micro-pattern imprinting onto aluminum thin sheet by CNC-controlled stamping, J. Steel Research International: 739-742.
Google Scholar
[22]
T. Aizawa, T. Itoh, K. Itoh, T. Fukuda, Micro-embossing of micro-patterns onto aluminum sheet by table-top CNC pressing, Proc. 8th Internal Session of JSTP (Kita-Kyushu): 363-364.
Google Scholar
[23]
T. Aizawa, K. Itoh, T. Fukuda, Imprinting of patterns onto polymers and oxide glasses via fine micro-patterning, Proc. 6th ICOMM Conference (Tokyo): 77-82.
Google Scholar
[24]
T. Aizawa, K. Itoh, T. Fukuda, Fine micro-stamping system for micro-pattern printing onto polymers and glasses, Proc. 10th International Conference on Technology of Plasticity, 2011: 1097-1102.
Google Scholar
[25]
K. Tokura, Removal Processing (Machining-1), JSME-Textbook Series, 2006, Ch. 5: 111.
Google Scholar
[26]
S. Doering, Soeren Richter, S. Nolte, A. Tuennermann, In-situ observation of the hole formation during deep drilling with ultra-short pulses, Proc. SPIE, 2011, 7925: 10235-10238.
Google Scholar
[27]
S. Doering, Soeren Richter, S. Nolte, A. Tuennermann, In-situ imaging of hole shape evoluation in ultra-short pulse drilling, Optics Express, 2010, 18: 345-350.
DOI: 10.1364/oe.18.020395
Google Scholar
[28]
D. Ashkenasi, N. Mueller, T. Kaszemeikat, G. Illing, Advanced laser micro machining using a novel trepanning system, JLMN-J. Laser Micro/Nano-engineering, 2011, 6 (19): 101-110.
DOI: 10.2961/jlmn.2011.01.0001
Google Scholar
[29]
H. Janseny, H. Gardeniers, M. de Boer, M. Elwenspoek and J. Fluitman, A survey on the reactive ion etching of silicon in microtechnology, J. Micromech. Microeng., 2996, 6: 14–28.
DOI: 10.1088/0960-1317/6/1/002
Google Scholar