Femtosecond Laser Micromachining of High Quality Groove on Sapphire Surface

Li Tao Qi; Jin Ping Hu

doi:10.4028/www.scientific.net/AMM.217-219.2213

Paper Titles

Overviews of the Behavior of Heat Transfer of Soft-Contact Electromagnetic Continuous Casting Mold
p.2194

An Investigation of Heat Affected Zone of Round Steel Rods Welded by Friction Welding
p.2198

Helical Drills Wear during Drilling of a New ELC Austenitic Stainless Steels
p.2202

Development of Mathematical Model for Chip Serration Frequency in Turning of Stainless Steel 304 Using RSM
p.2206

Femtosecond Laser Micromachining of High Quality Groove on Sapphire Surface
p.2213

Investigation into Indirect Selective Laser Sintering Alumina Ceramic Parts Combined with Cold Isostatic Pressing
p.2217

Variable White–Light Filaments Induced by Femtosecond Laser in PM567-Doped PMMA
p.2222

Simulation of Temperature Field and Thermal Stress Field during Laser Drilling
p.2226

Low-Temperature Polycrystalline Silicon Thin-Film Transistors Enhanced by Diode-Pumped Solid State Green Continuous-Wave Laser
p.2230

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 217-219Femtosecond Laser Micromachining of High Quality...

Femtosecond Laser Micromachining of High Quality Groove on Sapphire Surface

Abstract:

In this paper, high quality grooves were fabricated by femtosecond laser pulse on sapphire surface. Grooves were fabricated under different experimental conditions. The lateral and vertical machining precision was evaluated by scanning electron microscopy and profilometer. High quality grooves could be obtained at the condition of low pulse energy, high scanning-speed and increasing the number of laser scans. The relationship between the width and depth of the groove and the key parameters of femtosecond laser micromachining system was studied. Several samples of the high quality grooves were obtained by femtosecond laser pulses. High quality grooves have a potential application of the fabrication of sapphire-based devices.

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Periodical:

Applied Mechanics and Materials (Volumes 217-219)

Pages:

2213-2216

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.217-219.2213

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Online since:

November 2012

Authors:

Li Tao Qi, Jin Ping Hu

Keywords:

Femtosecond Laser, Groove Fabrication, Sapphire

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