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2004 Vol.14, Issue 6 Preview Page
Characteristic Study for Defect of Top Si and Buried Oxide Layer on the Bonded SOI Wafer

Bonded SOI Wafer의 Top Si과 Buried oxide layer의 결함에 대한 연구

김석구, 백운규, 박재근
June 2004. pp. 413~419
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Information
  • Publisher :Materials Research Society of Korea
  • Publisher(Ko) :한국재료학회
  • Journal Title :Korean Journal of Materials Research
  • Journal Title(Ko) :한국재료학회지
  • Volume : 14
  • No :6
  • Pages :413~419
  • DOI :https://doi.org/10.3740/MRSK.2004.14.6.413
Journal Informaiton Korean Journal of Materials Research Korean Journal of Materials Research
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