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2004 Vol.14, Issue 10 Preview Page
A Study on Pt/Al Reaction Mechanism in the FeRAM Device Integration

FeRAM 소자 제작 중에 발생하는 Pt/Al 반응 기구

조경원, 홍태환, 권순용, 최시경
October 2004. pp. 688~695
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Information
  • Publisher :Materials Research Society of Korea
  • Publisher(Ko) :한국재료학회
  • Journal Title :Korean Journal of Materials Research
  • Journal Title(Ko) :한국재료학회지
  • Volume : 14
  • No :10
  • Pages :688~695
  • DOI :https://doi.org/10.3740/MRSK.2004.14.10.688
Journal Informaiton Korean Journal of Materials Research Korean Journal of Materials Research
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