A hybrid structure of SnO2/Ag/SnO2/SiO2/Nb2O5 was deposited on soda lime glass substrate by sequential RF/DC magnetronsputtering at room temperature and its optical and electrical properties were systematically investigated as a function of topSnO2 thickness. EMP simulation results suggested that a multilayered film of SnO2 (40 nm)/Ag (10 nm)/SnO2 (30 nm)/SiO2(10 nm)/Nb2O5 (10 nm) exhibited the highest visible transmittance of 90.1% at 550 nm, whereas experimentally measuredtransmittance showed 85.1%, somewhat lower than simulation data. The lowest Rs and ρ value were about 3.21 Ω/sq and 3.21× 10−5 Ω cm, acquired at the multi-layers with the structure of SnO2 (40 nm)/Ag (10 nm)/SnO2 (30 nm)/SiO2 (10 nm)/Nb2O5(10 nm). In addition, the sheet resistance and resistivity of SnO2/Ag/SnO2/SiO2/Nb2O5 multi layer films increased systematicallywith increasing the thickness of SnO2 layer from 40 to 55 nm. It was shown that the ÖTC values of SnO2/Ag/SnO2/SiO2/Nb2O5multi layer film were in the range of 46.4-62.1 × 10−3 Ω−1.
KCI 등재
Optical and electrical properties of SnO2/Ag/SnO2/SiO2/ Nb2O5 hybrid film
Journal of Ceramic Processing Research
약어 : J. Ceram. Process. Res.
2016 vol.17, no.2, pp.80 - 84
DOI : 10.36410/jcpr.2016.17.2.80
발행기관 : 한양대학교 청정에너지연구소
연구분야 : 재료공학
Copyright © 한양대학교 청정에너지연구소
약어 : J. Ceram. Process. Res.
2016 vol.17, no.2, pp.80 - 84
DOI : 10.36410/jcpr.2016.17.2.80
발행기관 : 한양대학교 청정에너지연구소
연구분야 : 재료공학
Copyright © 한양대학교 청정에너지연구소
TMT structure, Transmittance, Sheet resistance, ΦTC
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Optical and electrical properties of SnO2/Ag/SnO2/SiO2/ Nb2O5 hybrid film
@article{ART002327622},
author={
김진균
and
윤상무
and
장건익
},
title={
Optical and electrical properties of SnO2/Ag/SnO2/SiO2/ Nb2O5 hybrid film
},
journal={
Journal of Ceramic Processing Research
},
issn={1229-9162},
year={2016},
number={2},
pages={80 - 84},
doi={10.36410/jcpr.2016.17.2.80},
url={http://dx.doi.org/10.36410/jcpr.2016.17.2.80}
TY - JOUR
AU - 김진균
AU - 윤상무
AU - 장건익
TI - Optical and electrical properties of SnO2/Ag/SnO2/SiO2/ Nb2O5 hybrid film
T2 - Journal of Ceramic Processing Research
PY - 2016
VL - 17
IS - 2
PB - 한양대학교 청정에너지연구소
SP - 80 - 84
SN - 1229-9162
AB - A hybrid structure of SnO2/Ag/SnO2/SiO2/Nb2O5 was deposited on soda lime glass substrate by sequential RF/DC magnetronsputtering at room temperature and its optical and electrical properties were systematically investigated as a function of topSnO2 thickness. EMP simulation results suggested that a multilayered film of SnO2 (40 nm)/Ag (10 nm)/SnO2 (30 nm)/SiO2(10 nm)/Nb2O5 (10 nm) exhibited the highest visible transmittance of 90.1% at 550 nm, whereas experimentally measuredtransmittance showed 85.1%, somewhat lower than simulation data. The lowest Rs and ρ value were about 3.21 Ω/sq and 3.21× 10−5 Ω cm, acquired at the multi-layers with the structure of SnO2 (40 nm)/Ag (10 nm)/SnO2 (30 nm)/SiO2 (10 nm)/Nb2O5(10 nm). In addition, the sheet resistance and resistivity of SnO2/Ag/SnO2/SiO2/Nb2O5 multi layer films increased systematicallywith increasing the thickness of SnO2 layer from 40 to 55 nm. It was shown that the ÖTC values of SnO2/Ag/SnO2/SiO2/Nb2O5multi layer film were in the range of 46.4-62.1 × 10−3 Ω−1.
KW - TMT structure, Transmittance, Sheet resistance, ΦTC
DO - 10.36410/jcpr.2016.17.2.80
UR - http://dx.doi.org/10.36410/jcpr.2016.17.2.80
ER -
김진균 , 윤상무 and 장건익 (2016). Optical and electrical properties of SnO2/Ag/SnO2/SiO2/ Nb2O5 hybrid film. Journal of Ceramic Processing Research, 17(2), 80 - 84.
김진균 , 윤상무 and 장건익 . 2016, “Optical and electrical properties of SnO2/Ag/SnO2/SiO2/ Nb2O5 hybrid film”, vol.17, no.2, pp. 80 - 84. Available from: doi:10.36410/jcpr.2016.17.2.80
김진균 외. “Optical and electrical properties of SnO2/Ag/SnO2/SiO2/ Nb2O5 hybrid film“ Journal of Ceramic Processing Research 17.2 pp. 80 - 84. (2016): 80.
김진균 , 윤상무 , 장건익 . Optical and electrical properties of SnO2/Ag/SnO2/SiO2/ Nb2O5 hybrid film Journal of Ceramic Processing Research [Internet]. 2016; 17(2), : 80 - 84. Available from: doi:10.36410/jcpr.2016.17.2.80
김진균 , 윤상무 and 장건익 . “Optical and electrical properties of SnO2/Ag/SnO2/SiO2/ Nb2O5 hybrid film“ Journal of Ceramic Processing Research 17, no.2, (2016): 80 - 84. doi: :10.36410/jcpr.2016.17.2.80